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Tadahiro Ohmi

Alps Electric

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Publication

Featured researches published by Tadahiro Ohmi.

Archive | 2001

Liquid feed nozzle, wet treatment, apparatus and wet treatment method

Kenichi Mitsumori; Yasuhiko Kasama; Akira Abe; Oh Eui Yeol; Tadahiro Ohmi; Takayuki Imaoka; Masayuki Yonezawa-shi Toda

Archive | 2003

Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation power

Akira Nakano; Tadahiro Ohmi

Archive | 1991

Reactive ion etching device

Tadahiro Ohmi; Yasuhiko Kasama; Hirobumi Fukui

Archive | 2001

Wet treatment apparatus

Kenichi Mitsumori; Tadahiro Ohmi

Archive | 2001

Performance evaluation method for plasma processing apparatus

Akira Nakano; Tadahiro Ohmi

Archive | 2002

Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method

Akira Nakano; Tadashi Kumagai; Tomofumi Oba; Tadahiro Ohmi

Archive | 2002

Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system

Akira Nakano; Shintaro Asuke; Takeshi Miyashita; Tadahiro Ohmi

Archive | 1995

Etching agent, electronic device and method of manufacturing the device

Matagoro Maeno; Masayuki Miyashita; Hirohisa Kikuyama; Tatsuhiro Yabune; Jun Takano; Hirofumi Fukui; Satoshi Miyazawa; Chisato Iwasaki; Tadahiro Ohmi; Yasuhiko Kasama; Hitoshi Seki

Archive | 2001

Plasma processing apparatus suitable for power supply of higher frequency

Akira Nakano; Tadahiro Ohmi

Archive | 1994

High frequency magnetron plasma apparatus

Makoto Sasaki; Hirofumi Fukui; Masami Aihara; Tadahiro Ohmi

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Collaboration

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Akira Nakano

Alps Electric

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Yasuhiko Kasama

Alps Electric

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Hirohisa Kikuyama

Tohoku University

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Masayuki Miyashita

Tohoku University

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Koichi Fukuda

National Institute of Advanced Industrial Science and Technology

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Tatsuhiro Yabune

Tohoku University

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Akira Abe

Alps Electric

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Hirofumi Fukui

Tohoku University

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Kenichi Mitsumori

Alps Electric

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Shoichi Ono

Alps Electric

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