Kazuo Morikawa
Industrial Technology Research Institute
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Publication
Featured researches published by Kazuo Morikawa.
international conference on indium phosphide and related materials | 2016
Daisuke Ogawa; Shoichiro Nakao; Kazuo Morikawa; Yasushi Hirose; Tetsuya Hasegawa
We investigated microstructures and transport properties of Nb-doped anatase TiO2 (TNO) films deposited by two methods: sputtering and pulsed laser deposition (PLD).We found that working pressure (Pw) of sputtering has a significant influence on both microstructures and transport properties. Cross-sectional observation by transmission electron microscopy revealed that lowered Pw improved homogeneity in the microstructure. This finding indicates that the inhomogeneous microstructure of the sputtered TNO films is not due to sputtering damage but to fluctuation in mass density. A sputtered film deposited at Pw = 0.50 Pa exhibited homogeneous microstructure and high Hall mobility comparable to those of PLD films.
Surface & Coatings Technology | 2014
Tetsuhide Shimizu; Hidetoshi Komiya; Tomotaro Watanabe; Yoshikazu Teranishi; Hiroshi Nagasaka; Kazuo Morikawa; Ming Yang
Thin Solid Films | 2015
Tetsuhide Shimizu; Yoshikazu Teranishi; Kazuo Morikawa; Hidetoshi Komiya; Tomotaro Watanabe; Hiroshi Nagasaka; Ming Yang
Thin Solid Films | 2017
Tetsuhide Shimizu; Hidetoshi Komiya; Yoshikazu Teranishi; Kazuo Morikawa; Hiroshi Nagasaka; Ming Yang
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms | 2012
Yoshikazu Teranishi; Masanori Ishizuka; Tomohiro Kobayashi; Isao Nakamura; Takahiko Uematu; Takeshi Yasuda; Atsushi Mitsuo; Kazuo Morikawa
Tribology Online | 2008
Masahiro Kawaguchi; Saiko Aoki; Atsushi Mitsuo; Kazuo Morikawa; Satoshi Uchida; Junho Choi; Takahisa Kato
Thin Solid Films | 2017
Hidetoshi Komiya; Tetsuhide Shimizu; Yoshikazu Teranishi; Kazuo Morikawa; Ming Yang
Quarterly Journal of The Japan Welding Society | 2017
Masayuki Aonuma; Taku Iwaoka; Isao Nakamura; Yoshikazu Teranishi; Kazuo Morikawa
Physica Status Solidi (a) | 2017
Daisuke Ogawa; Shoichiro Nakao; Kazuo Morikawa; Mizue Ebisawa; Yasushi Hirose; Tetsuya Hasegawa
The Japan Society of Applied Physics | 2016
Michitaka Fukumoto; Shoichiro Nakao; Kei Shigematsu; Daisuke Ogawa; Kazuo Morikawa; Yasushi Hirose; Tetsuya Hasegawa
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