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Dive into the research topics where Kazuo Shirota is active.

Publication


Featured researches published by Kazuo Shirota.


Archive | 2007

Synthetic quartz glass substrate for excimer lasers and making method

Hisatoshi Otsuka; Kazuo Shirota; Osamu Sekizawa


Archive | 2004

Burner and method for the manufacture of synthetic quartz glass

Hisatoshi Otsuka; Kazuo Shirota


Archive | 2002

Synthetic quartz glass blank

Hisatoshi Otsuka; Kazuo Shirota; Akira Fujinoki; Hiroyuki Nishimura; Takayuki Shimakawa


Archive | 2000

Synthetic fused silica member

Hisatoshi Otsuka; Kazuo Shirota; Kazuhiro Kumakura


Archive | 2002

Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof

Hisatoshi Otsuka; Kazuo Shirota


Archive | 2001

Synthetic qurtz glass and method of production

Koji Matsuo; Hisatoshi Otsuka; Kazuo Shirota; Shigeru Maida


Archive | 2004

Burner for the Manufacture of Synthetic Quartz Glass

Kazuo Shirota; Hisatoshi Otsuka; Toshiki Imai


Archive | 2000

Synthetic quartz glass and production process

Koji Matsuo; Hisatoshi Otsuka; Kazuo Shirota


Archive | 2000

Synthetic quartz glass member for excimer laser and method of making

Hisatoshi Otsuka; Kazuo Shirota; Akira Fujinoki


Archive | 1999

Synthetic quartz glass member

Akira Fujinoki; Hiroyuki Nishimura; Hisatoshi Otsuka; Takayuki Shimakawa; Kazuo Shirota; 和雄 代田; 久利 大塚; 貴行 島川; 朗 藤ノ木; 裕幸 西村

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