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Shigeru Maida

Shin-Etsu Chemical

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Publication

Featured researches published by Shigeru Maida.

Archive | 2006

Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate

Shigeru Maida; Motoyuki Yamada

Archive | 2008

TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS

Shigeru Maida; Hisatoshi Otsuka

Archive | 2006

Titania-doped quartz glass, euv lithographic member and photomask substrate and making method for titania-doped quartz glass

Shigeru Maida; Motoyuki Yamada; 素行 山田; 繁 毎田

Archive | 2009

TITANIA-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD

Shigeru Maida; Hisatoshi Otsuka

Archive | 2012

Titania-doped quartz glass and making method

Shigeru Maida; Hisatoshi Otsuka

Archive | 2001

Synthetic qurtz glass and method of production

Koji Matsuo; Hisatoshi Otsuka; Kazuo Shirota; Shigeru Maida

Archive | 2008

Titania-doped quartz glass member and producing method of the same

Shigeru Maida; Hisatoshi Otsuka; 久利 大塚; 繁 毎田

Archive | 2011

Titania-doped quartz glass, and method for manufacturing the same

Shigeru Maida; Hisatoshi Otsuka; Osamu Sekizawa; Naoki Yanagisawa

Archive | 2001

Fluorine-containing synthetic quartz glass and method of production

Shigeru Maida; Motoyuki Yamada; Hisatoshi Otsuka; Kazuo Shirota; Koji Matsuo

Archive | 2010

Titania and sulfur co-doped quartz glass member and making method

Shigeru Maida; Hisatoshi Otsuka

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Collaboration

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Hisatoshi Otsuka

Shin-Etsu Chemical

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Kazuo Shirota

Shin-Etsu Chemical

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Koji Matsuo

Shin-Etsu Chemical

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Motoyuki Yamada

Shin-Etsu Chemical

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Masanobu Ezaki

Shin-Etsu Chemical

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Tetsuji Ueda

Shin-Etsu Chemical

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Osamu Sekizawa

Shin-Etsu Chemical

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哲司 上田

Kyushu University

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Tetsuji Ueda

Shin-Etsu Chemical

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