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Kazuya Ono

Canon Inc.

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Publication

Featured researches published by Kazuya Ono.

Archive | 2009

Position detecting system

Yukio Yamane; Kazuya Ono

Archive | 1989

Movement guiding mechanism

Shigeo Sakino; Eiji Osanai; Mahito Negishi; Michio Horikoshi; Mitsuru Inoue; Kazuya Ono

Archive | 1994

Apparatus and method for exposure

Kazuya Ono; Yukio Yamane

Archive | 2002

Stage assembly including a damping assembly

Kazuya Ono; Andrew J. Hazelton

Archive | 2001

Multiple stage, stage assembly having independent stage bases

Kazuya Ono; Douglas C. Watson; Andrew J. Hazelton

Archive | 2004

Aligner and exposure method, and device manufacturing method

Toru Kiuchi; Kazuya Ono; 一也 小野; 徹 木内

Archive | 1997

POSITIONING DEVICE, AND EXPOSURE DEVICE PROVIDED WITH THE SAME

Kazuya Ono; 一也 小野

Archive | 2000

Linear motor, fluid circulation system for the same and exposing apparatus

Andrew J. Hazelton; Kazuya Ono; アンドリュー・ジェイ・ヘイゼルトン; 一也 小野

Archive | 1997

TABLE SUPPORTING APPARATUS

Kazuya Ono; 一也 小野

Archive | 1993

Positioning device and manufacture of semiconductor element using same

Kazuya Ono; 一也 小野

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Collaboration

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Andrew J. Hazelton

Nikon

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Yukio Yamane

Canon Inc.

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Eiji Osanai

Canon Inc.

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Mahito Negishi

Canon Inc.

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Masakazu Fujii

IHI Corporation

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Michio Horikoshi

Canon Inc.

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Mitsuharu Sonehara

IHI Corporation

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Mitsuru Inoue

Canon Inc.

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Shigeo Sakino

Canon Inc.

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Toshihiro Hayashi

IHI Corporation

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