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Yukio Yamane

Canon Inc.

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Publication

Featured researches published by Yukio Yamane.

Archive | 2009

Position detecting system

Yukio Yamane; Kazuya Ono

Archive | 1996

Positioning system and method and apparatus for device manufacture

Yukio Yamane; Eiji Osanai; Kotaro Akutsu

Archive | 2001

Exposure apparatus and method of cleaning optical element of the same

Tomoharu Hase; Yukio Yamane

Archive | 1988

Plate-like article holding device

Shuichi Yabu; Kazuo Takahashi; Yukio Yamane

Archive | 1994

Apparatus and method for exposure

Kazuya Ono; Yukio Yamane

Archive | 1995

POSITIONING DEVICE, AND DEVICE AND METHOD OF MANUFACTURING DEVICE

Eiji Osanai; Kotaro Tsui; Yukio Yamane; 浩太郎 堆; 英司 小山内; 幸男 山根

Archive | 1998

EXPOSURE SYSTEM, MANUFACTURE OF DEVICE, AND CLEANING METHOD OF OPTICAL DEVICE OF EXPOSURE SYSTEM

Tomoharu Hase; Yukio Yamane; 幸男 山根; 友晴 長谷

Archive | 1996

Substrate transfer system

Takao Ukaji; Yukio Yamane

Archive | 1991

Device for detecting information on position and transfer device using it

Kazuya Ono; Yukio Yamane; 一也 小野; 幸男 山根

Archive | 1998

Aligner and device manufacturing method therefor

Yoshinori Miwa; Yukio Yamane; 良則 三輪; 幸男 山根

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Collaboration

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Eiji Osanai

Canon Inc.

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Kazuya Ono

Canon Inc.

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Kotaro Akutsu

Canon Inc.

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Takao Ukaji

Canon Inc.

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Tomoharu Hase

Canon Inc.

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Yoshinori Miwa

Canon Inc.

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Kazuo Takahashi

Canon Inc.

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Shuichi Yabu

Canon Inc.

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