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Keisuke Shinagawa

Fujitsu

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Publication

Featured researches published by Keisuke Shinagawa.

Dry Etch Technology | 1992

Protection of aluminum alloy films from after corrosion using H2O down stream ashing

Fukashi Harada; Tetsuo Kondo; Jun-Ichi Konno; Shuzo Fujimura; Keisuke Shinagawa; T. Takada

While miniatuarization of semiconductors has enabled aluminum wiring pattern dimensions smaller and smaller, this has also given rise to problems such as stress migration and electromigration. The use of copper reportedly suppreses such migration.

Archive | 1994

Process and apparatus for ashing treatment

Keisuke Shinagawa; Shuzo Fujimura

Archive | 1989

Ashing method for removing an organic film on a substance of a semiconductor device under fabrication

Keisuke Shinagawa; Shuzo Fujimura; Kenichi Hikazutani

Archive | 1994

Method of removing resist mask and a method of manufacturing semiconductor device

Keisuke Shinagawa

Archive | 1988

Method of stripping a resist mask

Shuzo Fujimura; Keisuke Shinagawa; Naomichi Abe

Archive | 1990

Processing for stripping organic material

Shuzo Fujimura; Keisuke Shinagawa; Kenichi Hikazutani

Archive | 1991

Method for producing semiconductor integrated circuits and apparatus used in such method

Jun-Ichi Konno; Keisuke Shinagawa; Toshiyuki Ishida; Takahiro Ito; Tetsuo Kondo; Fukashi Harada; Shuzo Fujimura

Archive | 1995

Manufacture of semiconductor device with ashing and etching

Satoru Mihara; Keisuke Shinagawa; Tatsuya Takeuchi

Archive | 1995

Method for controlling apparatus for supplying steam for ashing process

Keisuke Shinagawa; Shuzo Fujimura; Yuuji Matoba; Yoshimasa Nakano; Tatsuya Takeuchi; Takeshi Miyanaga

Archive | 1997

Apparatus for removing organic resist from semiconductor

Shuzo Fujimura; Keisuke Shinagawa; Naomichi Abe

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Shuzo Fujimura

Fujitsu

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Kenichi Hikazutani

Fujitsu

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Tatsuya Takeuchi

Fujitsu

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Fukashi Harada

Fujitsu

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Jun-Ichi Konno

Fujitsu

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Naomichi Abe

Fujitsu

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Takeshi Miyanaga

Fujitsu

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Tetsuo Kondo

Fujitsu

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Yoshimasa Nakano

Fujitsu

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Yuuji Matoba

Fujitsu

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