Keisuke Shinagawa
Fujitsu
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Publication
Featured researches published by Keisuke Shinagawa.
Dry Etch Technology | 1992
Fukashi Harada; Tetsuo Kondo; Jun-Ichi Konno; Shuzo Fujimura; Keisuke Shinagawa; T. Takada
While miniatuarization of semiconductors has enabled aluminum wiring pattern dimensions smaller and smaller, this has also given rise to problems such as stress migration and electromigration. The use of copper reportedly suppreses such migration.
Archive | 1994
Keisuke Shinagawa; Shuzo Fujimura
Archive | 1989
Keisuke Shinagawa; Shuzo Fujimura; Kenichi Hikazutani
Archive | 1994
Keisuke Shinagawa
Archive | 1988
Shuzo Fujimura; Keisuke Shinagawa; Naomichi Abe
Archive | 1990
Shuzo Fujimura; Keisuke Shinagawa; Kenichi Hikazutani
Archive | 1991
Jun-Ichi Konno; Keisuke Shinagawa; Toshiyuki Ishida; Takahiro Ito; Tetsuo Kondo; Fukashi Harada; Shuzo Fujimura
Archive | 1995
Satoru Mihara; Keisuke Shinagawa; Tatsuya Takeuchi
Archive | 1995
Keisuke Shinagawa; Shuzo Fujimura; Yuuji Matoba; Yoshimasa Nakano; Tatsuya Takeuchi; Takeshi Miyanaga
Archive | 1997
Shuzo Fujimura; Keisuke Shinagawa; Naomichi Abe
