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Keith K. Koai

Applied Materials

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Publication

Featured researches published by Keith K. Koai.

Archive | 1999

300 mm CVD chamber design for metal-organic thin film deposition

David T. Or; Keith K. Koai; Fufa Chen; Lawrence C. Lei

Archive | 1998

Pattern of apertures in a showerhead for chemical vapor deposition

Xin Sheng Guo; Keith K. Koai; Ling Chen; Mohan K. Bhan; Bo Zheng

Archive | 1998

Reactor useful for chemical vapor deposition of titanium nitride

Keith K. Koai; Mark Johnson; Mei Chang; Lawrence Chung Lei

Archive | 2002

Reduced friction lift pin

David T. Or; Keith K. Koai; Hiroyuki Takahama; Takahiro Ito; Koji Ota; Hiroshi Sato

Archive | 1999

Wafer pedestal with a purge ring

Keith K. Koai; Lawrence Chung-Lai Lei; Russell C. Ellwanger

Archive | 1999

Apparatus and method for controlling a flow of process material to a deposition chamber

Keith K. Koai; Tung-Ching Tseng; James Jin-Long Chen; Mark Johnson; John Vincent Schmitt; Sean Li

Archive | 2006

Substrate support lift mechanism

Eric W. Schieve; Keith K. Koai; David T. Or; Rene T. Correa

Archive | 1997

Processing chamber and method for confining plasma

Keith K. Koai; Lawrence Chung-Lai Lei; Mei Chang; Mark Johnson

Archive | 1999

METHOD FOR PERFORMING METALLO-ORGANIC CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AT REDUCED TEMPERATURE

Shulin Wang; Huan Luo; Keith K. Koai; Ming Xi; Mei Chang; Russell C. Ellwanger

Archive | 2000

Chemical vapor deposition of copper using profiled distribution of showerhead apertures

Xin Sheng Guo; Keith K. Koai; Ling Chen; Mohan K. Bhan; Bo Zheng

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Collaboration

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David T. Or

Applied Materials

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Mark Johnson

Applied Materials

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Mei Chang

Applied Materials

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Bo Zheng

Applied Materials

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Eric W. Schieve

Applied Materials

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Hiroshi Sato

Applied Materials

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Hiroyuki Takahama

Applied Materials

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Koji Ota

Applied Materials

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Lawrence Chung-Lai Lei

Applied Materials

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Ling Chen

Applied Materials

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