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Lawrence Chung-Lai Lei

Applied Materials

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Publication

Featured researches published by Lawrence Chung-Lai Lei.

Archive | 1996

Chemical vapor deposition chamber

Lawrence Chung-Lai Lei; Ilya Perlov; Karl A. Littau; Alan F. Morrison; Mei Chang; Ashok K. Sinha

Archive | 2004

Dual gas faceplate for a showerhead in a semiconductor wafer processing system

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Anh N. Nguyen; Steve H. Chiao; Hanh D. Nguyen

Archive | 2000

Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques

Moris Kori; Alfred Mak; Jeong Soo Byun; Lawrence Chung-Lai Lei; Hua Chung; Ashok K. Sinha; Ming Xi

Archive | 1998

High temperature chemical vapor deposition chamber

Salvador P. Umotoy; Steve H. Chiao; Anh N. Nguyen; Be Van Vo; Joel M. Huston; James Jin-Long Chen; Lawrence Chung-Lai Lei

Archive | 2002

Showerhead assembly for a processing chamber

Mark M. Hytros; Truc T. Tran; Hongbee Teoh; Lawrence Chung-Lai Lei; Avgerinos V. Gelatos; Salvador P. Umotoy

Archive | 2001

Dual-gas delivery system for chemical vapor deposition processes

Mark M. Hytros; Truc T. Tran; Salvador P. Umotoy; Lawrence Chung-Lai Lei; Avgerinos V. Gelatos; Tong Zhang

Archive | 2000

Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces

Salvador P. Umotoy; Vincent Ku; Xiaoxiong Yuan; Lawrence Chung-Lai Lei

Archive | 2000

Resonant chamber applicator for remote plasma source

Be Van Vo; Salvador P. Umotoy; Son Trinh; Lawrence Chung-Lai Lei; Sergio Edelstein; Avi Tepman; Chien-Teh Kao; Kenneth Tsai

Archive | 2002

Variable flow deposition apparatus and method in semiconductor substrate processing

Avi Tepman; Lawrence Chung-Lai Lei

Archive | 1999

Integrated temperature controlled exhaust and cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

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Salvador P. Umotoy

Applied Materials

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Ashok K. Sinha

Applied Materials

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Cissy Leung

Applied Materials

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Alan F. Morrison

Applied Materials

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Karl A. Littau

Applied Materials

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Alfred Mak

Georgetown University

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James Jin-Long Chen

Applied Materials

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Joel M. Huston

Applied Materials

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Richard A. Marsh

Applied Materials

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Anh N. Nguyen

Applied Materials

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