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Dive into the research topics where Kenyu Haruta is active.

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Featured researches published by Kenyu Haruta.


IEEE Journal of Selected Topics in Quantum Electronics | 1995

Development of a 2-kW XeCl laser with a surface corona preionization scheme and a spiker-sustainer circuit

Yukio Sato; Mitsuo Inoue; Shuichi Fujikawa; Yoshio Saito; Akihiro Suzuki; Kenyu Haruta; Haruhiko Nagai

A maximum average power of 2.1 kW is demonstrated in a XeCl laser with an efficiency of 3.0% at a repetition rate of about 800 Hz. The 2-kW laser has a discharge region of 4 cm in gap length, 2.5 cm in discharge width, and an effective discharge length of 3 m with a resonator length of 5.2 m. A reverse voltage mode spiker-sustainer circuit makes it possible to apply a steep voltage rise of nearly 1000 kV//spl mu/s across the main discharge electrodes and to supply excitation energy effectively into the discharge region. The control of the preionization timing before the initiation of the spiker circuit is found to be indispensable in maintaining a homogeneous volume discharge under high repetition-rate operation. These techniques enable the laser to realize a long pulse excitation under the high repetition-rate operation conditions. The excitation process is analyzed by computer-model simulation. The application of a cascaded stable resonator has improved the average power by 6% compared with that of a conventional stable resonator. >


Archive | 1991

Excimer laser device

Kenyu Haruta; Haruhiko Nagai; Hajime Nakatani; Yoshihiko Yamamoto; Taketoshi Takemura; Takashi Eura; Shungo Tsuboi; Yoshifumi Matsushita; Tadao Minagawa


Archive | 1985

Discharge excitation type short pulse laser device

Kenyu Haruta; Hitoshi Wakata; Yukio Sato; Haruhiko Nagai; Hajime Nakatani; Hideki Kita


Archive | 1997

Laser transfer machining apparatus

Tomohiro Sasagawa; Kenyu Haruta; Yukio Sato; Hitoshi Wakata; Mitsuo Inoue; Akihiro Suzuki; Shuichi Fujikawa; Yoshio Saito


Archive | 1996

Thin film forming apparatus using laser and magnetic field

Kenyu Haruta; Koichi Ono; Mutsumi Tsuda; Takaaki Kawahara; Taisuke Furukawa


Archive | 1988

Laser wavelength stabilization

Hajime Nakatani; Yoshibumi Minowa; Hitoshi Wakata; Haruhiko Nagai; Kenyu Haruta


Archive | 1986

Excimer laser equipment

Kenyu Haruta; Hitoshi Wakata; Yukio Sato; Haruhiko Nagai


Archive | 1991

LASER OSCILLATOR CIRCUIT

Yukio Sato; Akihiro Suzuki; Mitsuo Inoue; Kenyu Haruta; Haruhiko Nagai


Archive | 1991

Switch device for laser

Hitoshi Wakata; Akihiro Suzuki; Kenyu Haruta; Haruhiko Nagai; Akihiko Iwata; Shinji Murata; Isamu Tanakura; Tomohiro Sasagawa; Yuito Kimura


Archive | 1993

Vorrichtung zur Ausbildung einer Dünnschicht unter Verwendung eines Lasers

Kenyu Haruta; Koichi Ono; Hitoshi Wakata; Mutsumi Tsuda; Yoshio Saito; Keisuke Nanba; Kazuyoshi Kojima; Tetsuya Takami; Akihiro Suzuki; Tomohiro Sasagawa; Kenichi Kuroda; Toshiyuki Oishi; Yukihiko Wada; Akihiko Furukawa; Yasuji Matsui; Akimasa Yuki; Takaaki Kawahara; Hideki Yabe; Taisuke Furukawa; Kouji Kise; Noboru Mikami; Tsuyoshi Horikawa; Tetsuro Makita; Kazuo Kuramoto; Naohiko Fujino; Hiroshi Kuroki; Tetsuo Ogama; Junji Tanimura

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