Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Yukio Sato is active.

Publication


Featured researches published by Yukio Sato.


IEEE Journal of Selected Topics in Quantum Electronics | 1995

Development of a 2-kW XeCl laser with a surface corona preionization scheme and a spiker-sustainer circuit

Yukio Sato; Mitsuo Inoue; Shuichi Fujikawa; Yoshio Saito; Akihiro Suzuki; Kenyu Haruta; Haruhiko Nagai

A maximum average power of 2.1 kW is demonstrated in a XeCl laser with an efficiency of 3.0% at a repetition rate of about 800 Hz. The 2-kW laser has a discharge region of 4 cm in gap length, 2.5 cm in discharge width, and an effective discharge length of 3 m with a resonator length of 5.2 m. A reverse voltage mode spiker-sustainer circuit makes it possible to apply a steep voltage rise of nearly 1000 kV//spl mu/s across the main discharge electrodes and to supply excitation energy effectively into the discharge region. The control of the preionization timing before the initiation of the spiker circuit is found to be indispensable in maintaining a homogeneous volume discharge under high repetition-rate operation. These techniques enable the laser to realize a long pulse excitation under the high repetition-rate operation conditions. The excitation process is analyzed by computer-model simulation. The application of a cascaded stable resonator has improved the average power by 6% compared with that of a conventional stable resonator. >


Archive | 2000

Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same

Tatsuki Okamoto; Tetsuya Ogawa; Keisuke Furuta; Hidetada Tokioka; Tomohiro Sasagawa; Junichi Nishimae; Mitsuo Inoue; Yukio Sato


Archive | 1985

Discharge excitation type short pulse laser device

Kenyu Haruta; Hitoshi Wakata; Yukio Sato; Haruhiko Nagai; Hajime Nakatani; Hideki Kita


Archive | 1997

Laser transfer machining apparatus

Tomohiro Sasagawa; Kenyu Haruta; Yukio Sato; Hitoshi Wakata; Mitsuo Inoue; Akihiro Suzuki; Shuichi Fujikawa; Yoshio Saito


Archive | 2002

Laser annealing optical system and laser annealing apparatus using the same

Tatsuki Okamoto; Tetsuya Ogawa; Yukio Sato; Junichi Nishimae


Archive | 1986

Excimer laser equipment

Kenyu Haruta; Hitoshi Wakata; Yukio Sato; Haruhiko Nagai


Archive | 1991

LASER OSCILLATOR CIRCUIT

Yukio Sato; Akihiro Suzuki; Mitsuo Inoue; Kenyu Haruta; Haruhiko Nagai


Archive | 1992

Discharge excitation gas laser apparatus

Shuichi Fujikawa; Mitsuo Inoue; Yukio Sato; Haruhiko Nagai


Archive | 1999

Uneven-pattern reading apparatus

Tatsuki Okamoto; Yukio Sato; Junichi Nishimae; Hiroyuki Kawano


Archive | 2000

Irregular pattern reader

Tatsuki Okamoto; Yukio Sato; Junichi Nishimae; Hiroyuki Kawano

Collaboration


Dive into the Yukio Sato's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge