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Kersch Alfred

Infineon Technologies

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Publication

Featured researches published by Kersch Alfred.

Archive | 2001

Parameter determining method e.g. for titanium deposition rate, involves comparing experimental verification result of substrate hole edge covering titanium layers, with table of simulated parameters for hole

Kersch Alfred; Ruf Alexander

Archive | 2000

Verfahren zur Herstellung einer mikrotechnischen Struktur und mikrotechnisches Bauelement

Schwarzl Siegfried; Kersch Alfred; Miethaner Stefan; Wendt Hermann

Archive | 2006

Verfahren zur Herstellung einseitiger Buried-Straps

Goebel Bernd; Steinhoegl Werner; Kersch Alfred; Gutsche Martin

Archive | 2003

Verfahren und Anlage zur Herstellung einseitiger Buried-Straps

Goebel Bernd; Steinhoegl Werner; Kersch Alfred; Gutsche Martin

Archive | 2003

Verbessertes chemisch-mechanisches Polierverfahren

Kersch Alfred; Baumgartl Johannes; Delage Stéphanie

Archive | 2005

Method and installation for fabricating buried straps on one side

Goebel Bernd; Gutsche Martin; Kersch Alfred; Steinhoegl Werner

Archive | 2005

Atomic layer deposition unit comprises a reactor chamber with a substrate holder, a heater, a pump and a carrier gas source

Prechtl Gerhard; Gutsche Martin; Kersch Alfred; Spitzer Andreas

Archive | 2003

Method to produce a ferro-electric solid-layer using an auxiliary material

Kersch Alfred; Spitzer Andreas

Archive | 2003

Production of a deep trench in a DRAM comprises forming a reactive substance outside the reaction chamber in a reaction space from a precursor

Kersch Alfred; Jacobs Werner; Schulze Icking Georg

Archive | 2003

Mounting device for wafer in plasma etching plant has sealant introduced into free space between wafer and electrode

Sabisch Winfried; Kersch Alfred

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Collaboration

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Spitzer Andreas

Infineon Technologies

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Gutsche Martin

Infineon Technologies

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Goebel Bernd

Infineon Technologies

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Steinhoegl Werner

Infineon Technologies

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Baumgartl Johannes

Infineon Technologies

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Delage Stéphanie

Infineon Technologies

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Sabisch Winfried

Infineon Technologies

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Jacobs Werner

Infineon Technologies

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Miethaner Stefan

Infineon Technologies

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Prechtl Gerhard

Infineon Technologies

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