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Khalid Sirajuddin

Applied Materials

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Publication

Featured researches published by Khalid Sirajuddin.

Archive | 2008

Post etch reactive plasma milling to smooth through substrate via sidewalls and other deeply etched features

Jon C. Farr; Sharma Pamarthy; Khalid Sirajuddin

Archive | 2009

METHOD AND APPARATUS OF A SUBSTRATE ETCHING SYSTEM AND PROCESS

Sharma Pamarthy; Jon C. Farr; Khalid Sirajuddin; Ezra Robert Gold; James P. Cruse; Scott Olszewski; Roy C. Nangoy; Saravjeet Singh; Douglas A. Buchberger; Jared Ahmad Lee; Chunlei Zhang

Archive | 2012

Methods for etching through-silicon vias with tunable profile angles

Puneet Bajaj; Tong Liu; Khalid Sirajuddin

Archive | 2010

METHOD OF FORMING A DEEP TRENCH IN A SUBSTRATE

Khalid Sirajuddin; Digvijay Raorane; Jon C. Farr; Sharma Pamarthy

Archive | 2010

METHOD OF FILLING A DEEP TRENCH IN A SUBSTRATE

Digvijay Raorane; Khalid Sirajuddin; Jon C. Farr; Sharma Pamarthy

Archive | 2012

METHODS FOR FABRICATING DUAL DAMASCENE INTERCONNECT STRUCTURES

Rohit Mishra; Jayagatan Ram Vijayen; Khalid Sirajuddin; Brad Eaton; Madhava Rao Yalamanchili

Archive | 2016

Edge ring for bevel polymer reduction

Rohit Mishra; Graeme Jamieson Scott; Khalid Sirajuddin; Sheshraj L. Tulshibagwale; Sriskantharajah Thirunavukarasu

Archive | 2014

Wafer Edge Protection and Efficiency Using Inert Gas and Ring

Dung Huu Le; Graeme Jamieson Scott; Jivko Dinev; Madhava Rao Yalamanchili; Khalid Sirajuddin; Puneet Bajaj; Saravjeet Singh

Archive | 2014

METHODS FOR PERFORMING A VIA REVEAL ETCHING PROCESS FOR FORMING THROUGH-SILICON VIAS IN A SUBSTRATE

Rohit Mishra; Khalid Sirajuddin; Madhava Rao Yalamanchili; Sonal A. Srivastava

Archive | 2012

INCREASED DEPOSITION EFFICIENCY AND HIGHER CHAMBER CONDUCTANCE WITH SOURCE POWER INCREASE IN AN INDUCTIVELY COUPLED PLASMA (ICP) CHAMBER

Jivko Dinev; Saravjeet Singh; Khalid Sirajuddin; Tong Liu; Puneet Bajaj; Rohit Mishra; Sonal A. Srivastava; Madhava Rao Yalamanchili; Ajay Kumar

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Collaboration

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Jon C. Farr

Applied Materials

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Sharma Pamarthy

Applied Materials

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Madhava Rao Yalamanchili

Applied Materials

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Rohit Mishra

Applied Materials

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Saravjeet Singh

Applied Materials

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Puneet Bajaj

Applied Materials

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Ajay Kumar

Applied Materials

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Chunlei Zhang

Applied Materials

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Digvijay Raorane

Applied Materials

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Douglas A. Buchberger

Applied Materials

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