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Khiem K. Nguyen

Applied Materials

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Publication

Featured researches published by Khiem K. Nguyen.

Archive | 2003

Mask etch processing apparatus

Khiem K. Nguyen; Peter Satitpunwaycha; Alfred Mak

Archive | 2006

Mask etch plasma reactor with cathode providing a uniform distribution of etch rate

Richard Lewington; Michael N. Grimbergen; Khiem K. Nguyen; Darin Bivens; Madhavi Chandrachood; Ajay Kumar

Archive | 2006

Method and apparatus for integrating metrology with etch processing

Khiem K. Nguyen; Richard Lewington

Archive | 2006

Cluster tool with integrated metrology chamber for transparent substrates

Richard Lewington; Corey Collard; Scott Alan Anderson; Khiem K. Nguyen

Archive | 2006

Mask etch plasma reactor with variable process gas distribution

Madhavi Chandrachood; Michael N. Grimbergen; Khiem K. Nguyen; Richard Lewington; Ibrahim M. Ibrahim; Sheeba J. Panayil; Ajay Kumar

Archive | 2006

Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside

Madhavi Chandrachood; Michael N. Grimbergen; Khiem K. Nguyen; Richard Lewington; Ibrahim M. Ibrahim; Sheeba J. Panayil; Ajay Kumar

Archive | 2006

Plasma reactor for processing a workpiece and having a tunable cathode

Richard Lewington; Michael N. Grimbergen; Khiem K. Nguyen; Darin Bivens; Madhavi Chandrachood; Ajay Kumar

Archive | 2005

Integrated metrology chamber for transparent substrates

Richard Lewington; Corey John Collard; S.A. Anderson; Khiem K. Nguyen

Archive | 2006

Interferometer endpoint monitoring device

Khiem K. Nguyen; Peter Satitpunwaycha; Alfred Mak

Archive | 2004

Tuned potential pedestal for mask etch processing apparatus

Peter Satitpunwaycha; Khiem K. Nguyen; Alfred Mak; Kenneth S. Collins

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Collaboration

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Richard Lewington

Applied Materials

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Madhavi Chandrachood

Applied Materials

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Ajay Kumar

Applied Materials

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Michael N. Grimbergen

Applied Materials

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Darin Bivens

Applied Materials

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Alfred Mak

Applied Materials

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Ibrahim M. Ibrahim

Applied Materials

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Peter Satitpunwaycha

Applied Materials

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Sheeba J. Panayil

Applied Materials

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Corey John Collard

University of Michigan

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