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Peter Satitpunwaycha

Applied Materials

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Publication

Featured researches published by Peter Satitpunwaycha.

Archive | 2006

Method and apparatus for photomask plasma etching

Ajay Kumar; Madhavi Chandrachood; Scott Alan Anderson; Peter Satitpunwaycha; Wai Fan Yau

Archive | 2003

Mask etch processing apparatus

Khiem K. Nguyen; Peter Satitpunwaycha; Alfred Mak

Archive | 1997

Aluminum hole filling method using ionized metal adhesion layer

Peter Satitpunwaycha; Gongda Yao; Kenny King-Tai Ngan; Zheng Xu

Archive | 1999

Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system

Gilbert Hausmann; Anantha K. Subramani; Peter Satitpunwaycha; Raymond Gristi; Bradley O. Stimson; Chia-Au Bill Lu; Lawrance A. Ringor; Michael Sugarman

Archive | 1997

Integrated PVD system for aluminum hole filling using ionized metal adhesion layer

Peter Satitpunwaycha; Gongda Yao; Kenny King-Tai Ngan; Zheng Xu

Archive | 1998

Rf electrode contact assembly for a detachable electrostatic chuck

Peter Satitpunwaycha; Joseph J. Stevens

Archive | 2002

Method and apparatus for critical flow particle removal

Stefanie Harvey; Peter Satitpunwaycha; Kallol Bera

Archive | 1997

Aluminium hole filling using ionized metal adhesion layer

Kenny King-Tai Ngan; Peter Satitpunwaycha; Zheng Xu; Gongda Yao

Archive | 2006

Interferometer endpoint monitoring device

Khiem K. Nguyen; Peter Satitpunwaycha; Alfred Mak

Archive | 2004

Tuned potential pedestal for mask etch processing apparatus

Peter Satitpunwaycha; Khiem K. Nguyen; Alfred Mak; Kenneth S. Collins

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Collaboration

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Alfred Mak

Applied Materials

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Khiem K. Nguyen

Applied Materials

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Anantha K. Subramani

Applied Materials

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Gongda Yao

Applied Materials

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Kenny King-Tai Ngan

Applied Materials

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Zheng Xu

Applied Materials

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Ajay Kumar

Applied Materials

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Bradley O. Stimson

Applied Materials

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Chia-Au Bill Lu

Applied Materials

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Gilbert Hausmann

Applied Materials

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