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Khurshed Sorabji

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Publication

Featured researches published by Khurshed Sorabji.

Archive | 2009

Methods and apparatus for a chemical vapor deposition reactor

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus; Melissa Archer; Harry A. Atwater; Stewart Sonnenfeldt

Archive | 2010

METHODS FOR HEATING WITH LAMPS

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

Vapor deposition reactor system

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

Showerhead for vapor deposition

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

Wafer carrier track

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

HEATING LAMP SYSTEM

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

Method for vapor deposition

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

Reactor lid assembly for vapor deposition

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

VAPOR DEPOSITION REACTOR SYSTEM AND METHODS THEREOF

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

Archive | 2010

HEATING LAMP SYSTEM AND METHODS THEREOF

Gang He; Gregg Higashi; Khurshed Sorabji; Roger Hamamjy; Andreas Hegedus

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Collaboration

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Gang He

California Institute of Technology

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Gregg Higashi

Nokia

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Harry A. Atwater

California Institute of Technology

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Melissa Archer

California Institute of Technology

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