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Klaus Breitschwerdt

Bosch

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Publication

Featured researches published by Klaus Breitschwerdt.

Archive | 2003

Method of etching structures into an etching body using a plasma

Andrea Urban; Franz Laermer; Klaus Breitschwerdt; Volker Becker

Archive | 2001

Module, especially a wafer module

Klaus Breitschwerdt; Hans Artmann; Wilhelm Frey; Karsten Funk; Juergen Neumann

Archive | 1992

Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing

Nils Kummer; Klaus Breitschwerdt

Archive | 2003

Device and method for anisotropic plasma etching of a substrate, a silicon body in particular

Franz Laermer; Klaus Breitschwerdt; Bernd Kutsch

Archive | 2003

Device and method for anisotropically plasma etching of a substrate, particularly a silicon body

Franz Laermer; Klaus Breitschwerdt; Bernd Kutsch

Archive | 2003

Electrical system, especially a microelectronic or microelectromechanical high frequency system

Klaus Breitschwerdt; Markus Ulm; Andrea Urban; Mathias Reimann

Archive | 2003

Verfahren zum Einätzen von Strukturen in einem Ätzkörper mit einem Plasma

Volker Becker; Klaus Breitschwerdt; Franz Laermer; Andrea Urban

Archive | 2000

Inductively-coupled plasma-etching equipment for silicon substrates includes two stacked coils producing field between substrate and ICP source

Klaus Breitschwerdt; Volker Becker; Franz Laermer; Andrea Schilp

Archive | 2003

Method and device for providing a semiconductor etching end point and for detecting the end point

Klaus Breitschwerdt; Franz Laermer

Archive | 2003

Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof

Andrea Urban; Franz Laermer; Klaus Breitschwerdt

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Collaboration

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Andrea Urban

Bosch

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Franz Laermer

Technische Universität München

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Andrea Schilp

Bosch

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Bernd Kutsch

Bosch

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Nils Kummer

Bosch

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Roland Mueller-Fiedler

Bosch

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Volker Becker

Bosch

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Hans Artmann

Bosch

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Juergen Neumann

Bosch

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Karsten Funk

Bosch

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