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Koji Ebara

East Tennessee State University

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Publication

Featured researches published by Koji Ebara.

Archive | 2007

Method for Manufacturing Silicon Wafer and Silicon Wafer Manufactured by this Method

Koji Ebara

Archive | 2000

Production method for silicon epitaxial wafer and silicon epitaxial wafer

Koji Ebara; Hiroki Ose; Yasuo Kasahara

Archive | 2006

Method for manufacturing silicon single crystal wafer

Koji Ebara

Archive | 2010

ANNEALED WAFER, METHOD FOR PRODUCING ANNEALED WAFER AND METHOD FOR FABRICATING DEVICE

Koji Ebara; Yoshinori Hayamizu; Hiroyasu Kikuchi

Archive | 2004

Method for measuring resistivity of semiconductor wafer

Koji Ebara

Archive | 2009

SILICON SINGLE CRYSTAL WAFER, METHOD FOR PRODUCING SILICON SINGLE CRYSTAL OR METHOD FOR PRODUCING SILICON SINGLE CRYSTAL WAFER, AND SEMICONDUCTOR DEVICE

Koji Ebara; Shizuo Annaka Igawa; Tetsuya Oka

Archive | 2012

METHOD FOR MANUFACTURING SILICON SUBSTRATE AND SILICON SUBSTRATE

Tetsuya Oka; Koji Ebara; Shuji Takahashi

Archive | 2010

Anneal wafer, method for manufacturing anneal wafer, and method for manufacturing device

Koji Ebara; Yoshinori Hayamizu; Hiroyasu Kikuchi

Archive | 2006

Method for manufacturing silicon epitaxial wafer and silicon epitaxial wafer

Koji Ebara; Hiroo Kasahara; Hiroki Ose; 広樹 大瀬; 幸治 江原; 裕夫 笠原

Archive | 2010

MANUFACTURING METHOD OF SILICON SUBSTRATE, AND SILICON SUBSTRATE

Koji Ebara; Tetsuya Oka; Shuji Takahashi; 鉄也 岡; 幸治 江原; 修治 高橋

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Tetsuya Oka

East Tennessee State University

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Shuji Takahashi

East Tennessee State University

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Hiroki Ose

East Tennessee State University

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Hiroyasu Kikuchi

East Tennessee State University

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Yoshinori Hayamizu

East Tennessee State University

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Shizuo Annaka Igawa

East Tennessee State University

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Yasuo Kasahara

East Tennessee State University

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