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Tetsuya Oka

East Tennessee State University

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Publication

Featured researches published by Tetsuya Oka.

Archive | 2009

SILICON SINGLE CRYSTAL WAFER, METHOD FOR PRODUCING SILICON SINGLE CRYSTAL OR METHOD FOR PRODUCING SILICON SINGLE CRYSTAL WAFER, AND SEMICONDUCTOR DEVICE

Koji Ebara; Shizuo Annaka Igawa; Tetsuya Oka

Archive | 2012

METHOD FOR MANUFACTURING SILICON SUBSTRATE AND SILICON SUBSTRATE

Tetsuya Oka; Koji Ebara; Shuji Takahashi

Archive | 2010

MANUFACTURING METHOD OF SILICON SUBSTRATE, AND SILICON SUBSTRATE

Koji Ebara; Tetsuya Oka; Shuji Takahashi; 鉄也 岡; 幸治 江原; 修治 高橋

Archive | 2014

Verfahren zum Herstellen eines Siliziumsubstrats und Siliziumsubstrat

Tetsuya Oka; Shuji Takahashi; Koji Ebara

Archive | 2013

Heat treatment method for wafer, method for producing silicon wafer, silicon wafer, and heat treatment apparatus

Koji Ebara; Tetsuya Oka; Shuji Takahashi

Archive | 2012

METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL WAFER AND ELECTRONIC DEVICE

Tetsuya Oka; Koji Ebara

Archive | 2012

Verfahren zum Herstellen eines Siliziumsubstrats und Siliziumsubstrat A method of manufacturing a silicon substrate and silicon substrate

Tetsuya Oka; Shuji Takahashi; Koji Ebara

Archive | 2011

Verfahren zum Herstellen eines Siliziumwafers und Siliziumwafer

Tetsuya Oka; Shuji Takahashi; Koji Ebara

Archive | 2011

METHOD FOR HEAT-TREATING WAFER, METHOD FOR PRODUCING SILICON WAFER, SILICON WAFER, AND HEAT TREATMENT APPARATUS

Koji Ebara; Tetsuya Oka; Shuji Takahashi

Archive | 2011

Verfahren zum Herstellen eines Siliziumwafers und Siliziumwafer A method for manufacturing a silicon wafer and silicon wafers

Tetsuya Oka; Shuji Takahashi; Koji Ebara

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Koji Ebara

East Tennessee State University

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Shuji Takahashi

East Tennessee State University

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Shizuo Annaka Igawa

East Tennessee State University

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Koji Annaka Ebara

East Tennessee State University

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