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Kotani Toshiya

Toshiba

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Publication

Featured researches published by Kotani Toshiya.

Archive | 2006

METHOD FOR GENERATING MASK DATA PATTERN, METHOD FOR MANUFACTURING PHOTOMASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Fujisawa Tadahito; Ito Kenji; Kotani Toshiya

Archive | 2004

Semiconductor device, pattern layout creation method and exposure mask

Mashita Hiromitsu; Kotani Toshiya; Maezono Atsushi; Nakano Ayako; Fujisawa Tadahito

Archive | 2006

METHOD FOR MAKING MASK PATTERN, METHOD FOR MAKING LAYOUT, METHOD FOR MANUFACTURING PHOTOMASK, PHOTOMASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Nakano Ayako; Kotani Toshiya

Archive | 2010

PATTERN VERIFYING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Kotani Toshiya; Mashita Hiromitsu; Taguchi Takafumi; Ogawa Ryuji

Archive | 2008

PARAMETER ADJUSTING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND PROGRAM

Kotani Toshiya; Kai Yasunobu; Inoue Soichi; Tanaka Satoshi; Nojima Shigeki; Masukawa Kazuyuki; Hashimoto Koji

Archive | 2007

LITHOGRAPHY SIMULATION METHOD, MASK PATTERN FORMING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Kotani Toshiya; Nojima Shigeki; Sanhongi Shoji

Archive | 2010

DESIGN LAYOUT DATA-CREATING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Taguchi Takafumi; Kotani Toshiya; Mashita Hiromitsu; Nakajima Fumiharu; Kodama Chikaaki

Archive | 2008

PATTERN VERIFICATION METHOD, PATTERN VERIFICATION SYSTEM, METHOD FOR MANUFACTURING MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Dewa Kyoko; Nojima Shigeki; Kotani Toshiya; Tanaka Satoshi

Archive | 2008

PATTERN FORMING METHOD, PATTERN FORMING PROGRAM, MANUFACTURING METHOD OF MASK, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Ito Kenji; Tanaka Satoshi; Kotani Toshiya; Fujisawa Tadahito; Hashimoto Koji

Archive | 2006

MASK PATTERN CORRECTING METHOD AND PHOTOMASK MANUFACTURING METHOD

Nakano Ayako; Kotani Toshiya; Asano Masashi

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Collaboration

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Nakajima Fumiharu

Toshiba

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Fukuhara Kazuya

Toshiba

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Tanaka Satoshi

Toshiba

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Hashimoto Koji

Toshiba

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Uno Taiga

Toshiba

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Kobayashi Sachiko

Toshiba

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Satake Masaki

Toshiba

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Yamamoto Kazuko

Toshiba

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