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Tanaka Satoshi

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Featured researches published by Tanaka Satoshi.

Archive | 2005

METHOD FOR MANUFACTURING MASK PATTERN, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, MANUFACTURING SYSTEM OF MASK PATTERN, CELL LIBRARY, AND METHOD FOR MANUFACTURING PHOTOMASK

Kotani Toshiya; Tanaka Satoshi; Inoue Soichi

Archive | 2004

METHOD FOR MANUFACTURING PHOTOMASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Nojima Shigeki; Sanhongi Shoji; Tanaka Satoshi; Kotani Toshiya; Hasebe Shigeru; Hashimoto Koji; Inoue Soichi; Ikenaga Osamu

Archive | 2004

METHOD AND SYSTEM FOR DECIDING AT LEAST DESIGN RULE OR PROCESS PARAMETER, AND MANUFACTURING METHOD OF SEMICONDUCTOR IC USING DECISION METHOD, AND SYSTEM FOR DECIDING AT LEAST ONE OF DESIGN RULE AND PROCESS PARAMETER

Kotani Toshiya; Tanaka Satoshi; Inoue Soichi; Mori Ichiro; Hashimoto Koji

Archive | 2004

METHOD FOR CORRECTING MASK PATTERN, PROGRAM FOR CORRECTING MASK PATTERN, METHOD FOR MANUFACTURING PHOTOMASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Kotani Toshiya; Tanaka Satoshi; Nojima Shigeki; Hashimoto Koji; Inoue Soichi

Archive | 2007

METHOD FOR FORMING MASK PATTERN, METHOD AND PROGRAM FOR MANUFACTURING MASK

Sanhongi Shoji; Tanaka Satoshi; Kawamura Daisuke

Archive | 2008

PARAMETER ADJUSTING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND PROGRAM

Kotani Toshiya; Kai Yasunobu; Inoue Soichi; Tanaka Satoshi; Nojima Shigeki; Masukawa Kazuyuki; Hashimoto Koji

Archive | 2008

PATTERN VERIFICATION METHOD, PATTERN VERIFICATION SYSTEM, METHOD FOR MANUFACTURING MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Dewa Kyoko; Nojima Shigeki; Kotani Toshiya; Tanaka Satoshi

Archive | 2008

PATTERN FORMING METHOD, PATTERN FORMING PROGRAM, MANUFACTURING METHOD OF MASK, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Ito Kenji; Tanaka Satoshi; Kotani Toshiya; Fujisawa Tadahito; Hashimoto Koji

Archive | 2006

METHOD FOR DEFINING ILLUMINATION BRIGHTNESS DISTRIBUTION

Dewa Kyoko; Fukuhara Kazuya; Tanaka Satoshi; Asano Masashi; Kotani Toshiya

Archive | 2004

MASK SET, METHOD FOR CREATING MASK DATA AND METHOD FOR FORMING PATTERN

Tanaka Satoshi; Hashimoto Koji

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Hashimoto Koji

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Kotani Toshiya

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Fukuhara Kazuya

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Kobayashi Sachiko

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Ichige Masayuki

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Sugimae Kikuko

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Yamamoto Kazuko

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