Kouichi Ohtaka
Ricoh
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Publication
Featured researches published by Kouichi Ohtaka.
Japanese Journal of Applied Physics | 1995
Hiroshi Miura; Kouichi Ohtaka; Daisuke Shindo
Effect of electron beam irradiation (15 kV) on Si surface cleaning prior to epitaxial growth in an ultrahigh-vacuum system was investigated. A CaF2 film was epitaxially grown on the Si surface, and the interface was observed by high-voltage electron microscopy. Amorphous layers, which were observed in the interface prepared with conventional thermal treatment at 750°C, became much smaller with electron beam irradiation after the thermal treatment. Based on the electron microscope observation, the effect of electron beam irradiation on Si surface cleaning was briefly discussed.
Archive | 1992
Yukito Sato; Mitsugu Irinoda; Kouichi Ohtaka; Takeshi Hino; Masafumi Kumano
Archive | 1989
Kouichi Ohtaka; Hiroshi Muira; Masafumi Kumano
Archive | 2006
Takeshi Nanjyo; Seiichi Katoh; Kouichi Ohtaka
Archive | 2002
Kouichi Ohtaka; Seiichi Katoh; Takeshi Nanjyo; Masanori Horike; Eiichi Ohta
Archive | 1998
Seiichi Kato; Kouichi Ohtaka; Hiromichi Komai; Junichi Azumi
Archive | 1998
Hironobu Mifune; Kouichi Ohtaka
Archive | 2000
Kouichi Ohtaka; Eiichi Ohta; Mitsugu Irinoda; Yohichiro Miyaguchi; Takeshi Takemoto; Kenichiro Hashimoto; Makoto Tanaka; Yutaka Ebi
Archive | 1998
Seiichi Kato; Kouichi Ohtaka; Makoto Tanaka; Eiji Mochizuki
Archive | 1994
Kouei Suzuki; Kouichi Ohtaka; Ikue Kawashima; Shuichi Hikichi
