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Koyo Morita

Hitachi

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Publication

Featured researches published by Koyo Morita.

Archive | 1991

Method of cutting interconnection pattern with laser and apparatus thereof

Tateoki Miyauchi; Mikio Hongo; Shigenobu Maruyama; Katsurou Mizukoshi; Hiroshi Yamaguchi; Koyo Morita

Archive | 1991

Laser machining apparatus and method of the same

Tateoki Miyauchi; Shigenobu Maruyama; Katsurou Mizukoshi; Mikio Hongo; Koyo Morita; Kaoru Katayama; Minoru Suzuki; Kazuo Mera; Haruhisa Sakamoto

Archive | 1979

Projection aligner and method of positioning a wafer

Hiroshi Nishizuka; Susumu Komoriya; Koyo Morita; Takayoshi Osakaya

Archive | 1978

Method of and apparatus for aligning photomask

Susumu Komoriya; Koyo Morita; Hiroshi Nishizuka; Hisashi Maejima

Archive | 1986

Projection aligner with a sensor for monitoring light quantity

Koyo Morita; Keizo Nomura; Hiroshi Nishizuka; Tai Hoshi; Yoichiro Tamiya; Terushige Asakawa

Archive | 1987

Projection aligner method utilizing monitoring of light quantity

Koyo Morita; Keizo Nomura; Hiroshi Nishizuka; Tai Hoshi; Yoichiro Tamiya; Terushige Asakawa

Archive | 1991

Procédé et appareil pour couper les réseaux d'interconnexion par laser

Tateoki Miyauchi; Mikio Hongo; Shigenobu Maruyama; Katsurou Mizukoshi; Hiroshi Yamaguchi; Koyo Morita

Archive | 1991

Laserbearbeitungsgerät und dessen Verfahren Laser processing apparatus and its method

Tateoki Miyauchi; Shigenobu Maruyama; Katsurou Mizukoshi; Mikio Hongo; Koyo Morita; Kaoru Katayama; Minoru Suzuki; Kazuo Mera; Haruhisa Sakamoto

Archive | 1991

Laserbearbeitungsgerät und dessen Verfahren Laser processing device and its method

Tateoki Miyauchi; Shigenobu Maruyama; Katsurou Mizukoshi; Mikio Hongo; Koyo Morita; Kaoru Katayama; Minoru Suzuki; Kazuo Mera; Haruhisa Sakamoto

Archive | 1985

A METHOD OF POSITIONING A WAFER IN A PROJECTION ALIGNER

Susumu Komoriya; Hiroshi Nishizuka; Koyo Morita; Takayoshi Osakaya

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Hiroshi Nishizuka

Hitachi

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Katsurou Mizukoshi

Hitachi

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Keizo Nomura

Hitachi

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Mikio Hongo

Hitachi

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Shigenobu Maruyama

Hitachi

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Tai Hoshi

Hitachi

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Tateoki Miyauchi

Hitachi

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Yoichiro Tamiya

Hitachi

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Susumu Komoriya

Hitachi

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Terushige Asakawa

Hitachi

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