Tateoki Miyauchi
Hitachi
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Tateoki Miyauchi.
CIRP Annals | 1983
Tateoki Miyauchi; Mikio Hongo; Toshiaki Masuhara; Osamu Minato; Takao Kawanabe; Kouichi Nagasawa; Norio Taniguchi
Summary A laser diffusion technology to connect poly-silicon conductors for programming VLSI memories is developed. It is based on the fact that a Nitrogen laser pumped dye laser of 510 nm wavelength irradiated on an intrinsic poly-silicon film in a VLSI, having 10 10 2 resistivity, decreases the film resistivity to 10 3 Ω. The mechanism of resistivity reduction is due to the laser heat diffusion of impurity into the intrinsic poly-silicon film. It is also clarified that the passivation film thick-ness on the intrinsic poly-silicon film changes laser reflectivity from zero to over 50%, affecting the condition of the process. The practical processing condition of laser diffusion connection for VLSI programming to enhance chip yield without damage is obtained.
CIRP Annals | 1992
Tateoki Miyauchi; Mikio Hongo; Katsurou Mizukoshi; Masaaki Okunaka; Takao Kawanabe; Yasuhiro Koizumi; N. Taniguchi
Summary A new technique is developed for repairing transparent defects on high density masks for VLSI. A thin Ag-Ta organometallic film is first spin-coated onto a photomask and baked. Then an Ar laser microspot is applied to a small area on this film. After rinsing the mask with a solvent, an opaque layer remains at the laser-irradiated spot and the rest of the organometallic material is washed away. The opaque film formed locally by laser irradiation is dense enough to prevent light transmission and durable enough to withstand repeated washing with strong alkali and acid solutions.
Archive | 1982
Hiroshi Yamaguchi; Tateoki Miyauchi; Akira Shimase; Mikio Hongo
Archive | 1984
Hiroshi Yamaguchi; Akira Shimase; Tateoki Miyauchi; Mikio Hongo
Archive | 1996
Takashi Matsumoto; Shinichi Kazui; Hideaki Sasaki; Tateoki Miyauchi; Tatsuji Sakamoto
Archive | 1975
Tateoki Miyauchi; Junichi Nakabayashi; Tomoyoshi Mikoshiba
Archive | 1991
Tateoki Miyauchi; Mikio Hongo; Shigenobu Maruyama; Katsurou Mizukoshi; Hiroshi Yamaguchi; Koyo Morita
Archive | 1982
Tateoki Miyauchi; Katsuro Mizukoshi; Mikio Hongo; Masao Mitani; Masaaki Okunaka; Takao Kawanabe; Isao Tanabe
Archive | 1987
Hiroshi Yamaguchi; Mikio Hongo; Tateoki Miyauchi; Akira Shimase; Satoshi Haraichi; Takahiko Takahashi; Keiya Saito
Archive | 1982
Mikio Hongo; Masao Mitani; Tateoki Miyauchi; Masaaki Okunaka; Katsuro Mizukoshi