Krishna Vepa

Reducing semiconductor process tool resource usage – pilot project results

Applied Materials is working with customers to assess new ways to identify opportunities to reduce resources usage (energy, process chemicals/gasses) by existing semiconductor process tools. Through six customer pilot projects we have identified potential average savings of

Edge removal of silicon-on-insulator transfer wafer

22.5K per year, for the CMP and CVD process tool examined, by using a consultative service approach to business and financial analysis that pinpoints opportunities for process resource reduction without diverting critical engineering personnel from their core responsibilities.