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Kuei Shun Chen

TSMC

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Publication

Featured researches published by Kuei Shun Chen.

Archive | 2010

DUMMY VIAS FOR DAMASCENE PROCESS

Kuei Shun Chen; Chin-Hsiang Lin; Vencent Chang; Lawrence Lin; Lai Chien Wen; Jhun Hua Chen

Archive | 2005

System and method for photolithography in semiconductor manufacturing

Kuei Shun Chen; Chin-Hsiang Lin; Tsai-Sheng Gau; Chun-Kuang Chen; Hsiao-Tzu Lu; Fu-Jye Liang

Archive | 2006

Semiconductor Device Having In-Chip Critical Dimension and Focus Patterns

George Liu; Vencent Chang; Chin-Hsiang Lin; Kuei Shun Chen; Norman Chen

Archive | 2010

Controlling gate formation for high density cell layout

Harry-Hak-Lay Chuang; Bao-Ru Young; Kuei Shun Chen; Cheng Cheng Kuo; George Liu; Tsung-Chieh Tsai; Yuhi-Jier Mii

Archive | 2007

METHOD OF PATTERN FORMATION IN SEMICONDUCTOR FABRICATION

George Liu; Kuei Shun Chen; Vencent Chang; Shang-wen Chang

Archive | 2010

SYSTEM AND METHOD FOR PROVIDING ALIGNMENT MARK FOR HIGH-K METAL GATE PROCESS

Kuei Shun Chen; Meng-Wei Chen; George Liu; Jiann Yuan Huang; Chia-Ching Lin

Archive | 2013

INTEGRATED CIRCUIT METHOD WITH TRIPLE PATTERNING

Chia-Chu Liu; Kuei Shun Chen; Meng Wei Chen

Archive | 2012

OPTICAL PROXIMITY CORRECTION CONVERGENCE CONTROL

Cheng-Cheng Kuo; Ching-Che Tsai; Tzu-Chun Lo; Chih-Wei Hsu; Hua-Tai Lin; Tsai-Sheng Gau; Wen-Chun Huang; Chih-Shiang Chou; Hsin-Chang Lee; Kuei Shun Chen

Archive | 2012

SEMICONDUCTOR STRUCTURE AND METHOD AND TOOL FOR FORMING THE SEMICONDUCTOR STRUCTURE

George Liu; Kuei Shun Chen

Archive | 2007

Method of Inhibiting Photoresist Pattern Collapse

Ching-Yu Chang; Heng-Jen Lee; Chin-Hsiang Lin; Hua-Tai Lin; Kuei Shun Chen; Bang-Chein Ho; Li-Kong Turn; Hung-Jui Kuo; Ko-Bin Kao; Tsung-Chih Chien

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George Liu

TSMC

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Chin-Hsiang Lin

TSMC

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Vencent Chang

TSMC

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Hsiao-Tzu Lu

TSMC

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Tsai-Sheng Gau

TSMC

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Chia-Chu Liu

TSMC

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Chia-Hsiang Lin

TSMC

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Chih-Yang Yeh

TSMC

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Hua-Shu Wu

TSMC

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Meng Wei Chen

TSMC

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