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Kugler Jens

Carl Zeiss AG

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Publication

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Archive | 2002

Objektiv, insbesondere Projektionsobjektiv für die Halbleiter-Lithographie

Osterried Karlfrid; Petasch Thomas; Kugler Jens

Archive | 2005

Optikmodul für ein Objektiv

Kugler Jens; Sorg Franz

Archive | 2012

Optisches Modul mit einer Messeinrichtung

Hembacher Stefan; Limbach Guido; Schoeppach Armin; Kugler Jens

Archive | 2004

Securing optical element holders together using screws, for projection lenses in microlithography, by measuring region of holder surface using interferometric measuring device, and varying torque to achieve uniform interference pattern

Kugler Jens; Weber Ulrich

Archive | 2008

LITHOGRAFIEOBJEKTIV MIT AUSWECHSELVORRICHTUNG FÜR EIN OPTISCHES ELEMENT UND HERSTELLUNGSVERFAHREN MITTELS DIESES LITHOGRAFIEOBJEKTIVES

Kugler Jens; Sorg Franz; Wurmbrand Andreas; Ittner Thomas; Schletterer Thomas

Archive | 2003

Fassung für ein optisches Element in einer optischen Abbildungseinrichtung

Weber Ulrich; Becker Jochen; Holderer Hubert; Gellrich Bernhard; Kugler Jens

Archive | 2017

OPTISCHES SYSTEM, BLENDE SOWIE LITHOGRAPHIEANLAGE

Figueredo Stacy; Kugler Jens; Nefzi Marwene; Hartjes Joachim; Hembacher Stefan

Archive | 2017

OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE

Kugler Jens; Hembacher Stefan; Schmid Michaela; Geuppert Bernhard; Corves Burkhard; Riedel Martin; Wahle Martin; Hüsing Mathias; Lorenz Michael; Detert Tim; Nefzi Marwene

Archive | 2014

OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING AND SUPPORTING DEVICES

Kugler Jens; Sorg Franz; Kwan Yim-Bun Patrick

Archive | 2009

OPTISCHE ELEMENTEINHEIT FÜR BELICHTUNGSPROZESSE

Gellrich Bernhard; Kugler Jens; Limbach Guido; Kaller Julian; Scherle Hans Juergen; Schmerek Dieter; Mueller Detlev; Schletterer Thomas

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Hembacher Stefan

Carl Zeiss AG

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Gellrich Bernhard

Carl Zeiss AG

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Sorg Franz

Carl Zeiss AG

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Limbach Guido

Carl Zeiss AG

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Schletterer Thomas

Carl Zeiss AG

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Weber Ulrich

Carl Zeiss AG

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Becker Jochen

Carl Zeiss AG

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Hartjes Joachim

Carl Zeiss AG

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Holderer Hubert

Carl Zeiss AG

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Ittner Thomas

Carl Zeiss AG

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