Kunihiko Sakurai | Researchain

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Archive | 2001

Substrate holding apparatus

Tetsuji Togawa; Ikutarao Noji; Keisuke Namiki; Hozumi Yasuda; Shunichiro Kojima; Kunihiko Sakurai; Nobuyuki Takada; Osamu Nabeya; Makoto Fukushima; Hideki Takayanagi

Archive | 1995

Dressing apparatus and method

Seiji Katsuoka; Kunihiko Sakurai; Tetsuji Togawa

Archive | 2000

Substrate holder and substrate transfer apparatus using the same

Hiroo Suzuki; Kenya Ito; Kunihiko Sakurai; Satoshi Wakabayashi; Tetsuji Togawa

Archive | 2002

Substrate holding device and polishing device

Tetsuji Togawa; Osamu Nabeya; Makoto Fukushima; Kunihiko Sakurai; Hiroshi Yoshida; Teruhiko Ichimura

Archive | 2007

Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus

Kunihiko Sakurai; Tetsuji Togawa; Yoshihiro Mochizuki; Akira Fukuda; Hirokuni Hiyama; Kazuto Hirokawa; Manabu Tsujimura

Archive | 2001

Substrate holding device, polishing device and grinding method

Makoto Fukushima; Shiyunichirou Kojima; Osamu Nabeya; Keisuke Namiki; Ikutaro Nomichi; Kunihiko Sakurai; Nobuyuki Takada; Hideki Takayanagi; Tetsuji Togawa; Hozumi Yasuda; 計介並木; 俊市朗兒嶋; 穂積安田; 哲二戸川; 邦彦桜井; 誠福島; 郁太郎野路; 治鍋谷; 秀樹高柳; 暢行高田

Archive | 1997

Polishing apparatus having robotic transport apparatus

Tetsuji Togawa; Kuniaki Yamaguchi; Kunihiko Sakurai

Archive | 1997

Robotic transport apparatus having a guard against water

Tetsuji Togawa; Kuniaki Yamaguchi; Kunihiko Sakurai

Archive | 2002

Substrate polishing machine

Tetsuji Togawa; Ikutaro Noji; Keisuke Namiki; Hozumi Yasuda; Shunichiro Kojima; Kunihiko Sakurai; Nobuyuki Takada; Osamu Nabeya; Makoto Fukushima; Hideki Takayanagi

Archive | 1998