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Dive into the research topics where Osamu Nabeya is active.

Publication


Featured researches published by Osamu Nabeya.


Archive | 2001

Substrate holding apparatus

Tetsuji Togawa; Ikutarao Noji; Keisuke Namiki; Hozumi Yasuda; Shunichiro Kojima; Kunihiko Sakurai; Nobuyuki Takada; Osamu Nabeya; Makoto Fukushima; Hideki Takayanagi


Archive | 2010

Elastic membrane for semiconductor wafer polishing apparatus

Hozumi Yasuda; Keisuke Namiki; Makoto Fukushima; Osamu Nabeya; Koji Saito; Satoru Yamaki; Tomoshi Inoue; Shingo Togashi; Tetsuji Togawa


Archive | 2004

Substrate holding apparatus and polishing apparatus

Tetsuji Togawa; Hiroshi Yoshida; Osamu Nabeya; Makoto Fukushima; Koichi Fukaya


Archive | 2002

Dressing apparatus and polishing apparatus

Tetsuji Togawa; Osamu Nabeya


Archive | 2003

Electrolytic processing apparatus and method

Mitsuhiko Shirakashi; Masayuki Kumekawa; Hozumi Yasuda; Itsuki Kobata; Osamu Nabeya


Archive | 2009

Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino


Archive | 2003

Polishing apparatus and method for detecting foreign matter on polishing surface

Osamu Nabeya; Tetsuji Togawa


Archive | 2002

Substrate holding device and polishing device

Tetsuji Togawa; Osamu Nabeya; Makoto Fukushima; Kunihiko Sakurai; Hiroshi Yoshida; Teruhiko Ichimura


Archive | 2007

Substrate holding apparatus, polishing apparatus, and polishing method

Hozumi Yasuda; Tetsuji Togawa; Osamu Nabeya; Kenichiro Saito; Makoto Fukushima; Tomoshi Inoue


Archive | 2001

Substrate holding device, polishing device and grinding method

Makoto Fukushima; Shiyunichirou Kojima; Osamu Nabeya; Keisuke Namiki; Ikutaro Nomichi; Kunihiko Sakurai; Nobuyuki Takada; Hideki Takayanagi; Tetsuji Togawa; Hozumi Yasuda; 計介 並木; 俊市朗 兒嶋; 穂積 安田; 哲二 戸川; 邦彦 桜井; 誠 福島; 郁太郎 野路; 治 鍋谷; 秀樹 高柳; 暢行 高田

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