Kwang-shin Lim | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Kwang-shin Lim is active.

Explore More

Publication

Featured researches published by Kwang-shin Lim.

Archive | 2004

Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device

Yong-Kyun Ko; Sang-mun Chon; In-Hoi Doh; Pil-kwon Jun; Sang-Mi Lee; Kwang-shin Lim; Myoung-Ok Han

Archive | 2003

Apparatus for manufacturing integrated circuit device

Kwang-shin Lim; Pil-kwon Jun; Hun-jung Yi; Sang-oh Park; Yong-Kyun Ko

Archive | 2010

METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING COMPOSITIONS FOR ETCHING COPPER

Jung-dae Park; Da-Hee Lee; Seung-ki Chae; Pil-kwon Jun; Kwang-shin Lim

Archive | 2006

Cleaning composition and related methods

Se-Yeon Kim; Pil-kwon Jun; Jung-dae Park; Myoung-Ok Han; Jea-Wook Kim; Seung-ki Chae; Kook-Joo Kim; Jae-seok Lee; Yong-Kyun Ko; Kwang-shin Lim; Yang-koo Lee

Archive | 2006

Method of removing a low-k layer and method of recycling a wafer using the same

Dong-won Hwang; Yang-koo Lee; Dong-Chul Heo; Pil-kwon Jun; Kwang-shin Lim; Sang-Eon Lee

Archive | 2006

Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition

Jung-dae Park; Pil-kwon Jun; Myoung-Ok Han; Se-Yeon Kim; Kwang-shin Lim; Tae-Hyo Choi; Seung-ki Chae; Yang-koo Lee

Archive | 2004

Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus

Sang-mun Chon; Jin-Sung Kim; Pil-kwon Jun; Sang-oh Park; Yong-Kyun Ko; Kwang-shin Lim; Hun-jung Yi

Archive | 2006

Composition and methods removing polysilicon

Dong-won Hwang; Hun-jung Yi; Kwang-shin Lim; Jung-dae Park

Archive | 2007

Composition for removing a polymeric contaminant and method of removing a polymeric contaminant using the same

Sang-Mi Lee; Kwang-shin Lim; Jung-dae Park; Tae-Hyo Choi

Archive | 2006

半導体基板用洗浄液組成物、該洗浄液組成物の製造方法、該洗浄液組成物を用いた半導体基板の洗浄方法、および該洗浄方法を含む半導体素子の製造方法

Seung-ki Chae; Myoung-Ok Han; Pil-kwon Jun; Jea-Wook Kim; Kook-Joo Kim; Se-Yeon Kim; Yong-Kyun Ko; Jae-seok Lee; Yang-koo Lee; Kwang-shin Lim; Jung-dae Park

Explore More