Yong-Kyun Ko | Researchain

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Featured researches published by Yong-Kyun Ko.

Archive | 2004

Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device

Yong-Kyun Ko; Sang-mun Chon; In-Hoi Doh; Pil-kwon Jun; Sang-Mi Lee; Kwang-shin Lim; Myoung-Ok Han

Archive | 2003

Apparatus for manufacturing integrated circuit device

Kwang-shin Lim; Pil-kwon Jun; Hun-jung Yi; Sang-oh Park; Yong-Kyun Ko

Archive | 2005

Wafer guides for processing semiconductor substrates

Pil-kwon Jun; Sang-oh Park; Yong-Kyun Ko; Hun-jung Yi

Archive | 2006

Cleaning composition and related methods

Se-Yeon Kim; Pil-kwon Jun; Jung-dae Park; Myoung-Ok Han; Jea-Wook Kim; Seung-ki Chae; Kook-Joo Kim; Jae-seok Lee; Yong-Kyun Ko; Kwang-shin Lim; Yang-koo Lee

Archive | 2004

Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus

Sang-mun Chon; Jin-Sung Kim; Pil-kwon Jun; Sang-oh Park; Yong-Kyun Ko; Kwang-shin Lim; Hun-jung Yi

Archive | 2007

SUPPORTER AND APPARATUS FOR CLEANING SUBSTRATES WITH THE SUPPORTER, AND METHOD FOR CLEANING SUBSTRATES

Hun-jung Yi; Yong-Kyun Ko

Archive | 1996

Pretreatment system for analyzing impurities contained in flat sample

Jin-Ho Ju; Sung-Chul Kang; Yong-Kyun Ko

Archive | 2008

Cleaning solution for immersion photolithography system and immersion photolithograph process using the cleaning solution

Se-Yeon Kim; Yong-Kyun Ko; Sang-Mi Lee; Yang-koo Lee; Hun-jung Yi; Kun-tack Lee

Archive | 2006

半導体基板用洗浄液組成物、該洗浄液組成物の製造方法、該洗浄液組成物を用いた半導体基板の洗浄方法、および該洗浄方法を含む半導体素子の製造方法

Seung-ki Chae; Myoung-Ok Han; Pil-kwon Jun; Jea-Wook Kim; Kook-Joo Kim; Se-Yeon Kim; Yong-Kyun Ko; Jae-seok Lee; Yang-koo Lee; Kwang-shin Lim; Jung-dae Park

Archive | 2004