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Kwok Fai Lai

Varian Associates

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Publication

Featured researches published by Kwok Fai Lai.

Archive | 1993

Physical vapor deposition employing ion extraction from a plasma

John C. Helmer; Kwok Fai Lai; Robert L. Anderson

Archive | 1995

Magnetron sputtering source for low pressure operation

Kwok Fai Lai

Archive | 1997

Inductively coupled plasma reactor with faraday-sputter shield

Kwok Fai Lai; John Drewery

Archive | 1997

Inductively coupled plasma reactor having faraday sputter shield

John Drewery; Kwok Fai Lai; クウォク・ファイ・ライ; ジョン・ドレウェリイ

Archive | 1997

Réacteur à plasma à couplage inductif avec écran Faraday anti-pulvérisation

Kwok Fai Lai; John Drewery

Archive | 1997

Induktivgekoppelter Plasmareaktor mit Zerstäubung verhinderndem Faraday-Schirm

Kwok Fai Lai; John Drewery

Archive | 1997

ファラデー・スパッタ・シールドを有する誘導結合されたプラズマリアクタ

John Drewery; Kwok Fai Lai; クウォク・ファイ・ライ; ジョン・ドレウェリイ

Archive | 1994

Gasphasenabscheidungen mittels Ionenextraction aus einem Plasma

John C. Helmer; Kwok Fai Lai; Robert L Anderson

Archive | 1994

Gasphasenabscheidungen mittels Ionenextraction aus einem Plasma Chemical vapor deposition processes by means of a plasma Ionenextraction

John C. Helmer; Kwok Fai Lai; Robert L Anderson

Archive | 1994

Pvd device employing ion extraction from plasma

Robert L Anderson; John C. Helmer; Kwok Fai Lai; クオク・ファイ・ライ; ジョン・シー・ヘルマー; ロバート・エル・アンダーソン

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John C. Helmer

Varian Associates

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John Drewery

Varian Associates

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Robert L Anderson

Varian Semiconductor

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Robert L. Anderson

Varian Associates

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