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Robert L Anderson

Varian Semiconductor

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Publication

Featured researches published by Robert L Anderson.

Archive | 1992

Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile

Robert L Anderson; John C. Helmer

Archive | 1990

Zerstäubungsanlage mit rotierender Magnetanordnung, deren Geometrie ein vorgegebenes Targetabtragprofil erzeugt.

Robert L Anderson; John C. Helmer

Archive | 1994

Gasphasenabscheidungen mittels Ionenextraction aus einem Plasma

John C. Helmer; Kwok Fai Lai; Robert L Anderson

Archive | 1994

Gasphasenabscheidungen mittels Ionenextraction aus einem Plasma Chemical vapor deposition processes by means of a plasma Ionenextraction

John C. Helmer; Kwok Fai Lai; Robert L Anderson

Archive | 1994

Pvd device employing ion extraction from plasma

Robert L Anderson; John C. Helmer; Kwok Fai Lai; クオク・ファイ・ライ; ジョン・シー・ヘルマー; ロバート・エル・アンダーソン

Archive | 1994

Gas-phase deposition from a plasma by means Ionenextraction

John C. Helmer; Kwok Fai Lai; Robert L Anderson

Archive | 1991

Ferstaubungsanlage with a rotating magnet assembly, the geometry of which produces a predetermined Targetabtragsprofil

Robert L Anderson; John C. Helmer

Archive | 1991

Sputtering with a rotating magnet assembly, the geometry of which produces a predetermined Targetabtragsprofil

Robert L Anderson; John C. Helmer

Archive | 1991

Ferstaubungsanlage mit rotierender Magnetanordnung, deren Geometrie ein vorgegebenes Targetabtragsprofil erzeugt Ferstaubungsanlage with rotating magnet array whose geometry generates a predetermined Targetabtragsprofil

Robert L Anderson; John C. Helmer

Archive | 1990

Sputtering system geometrically arrayed with plural rotary type magnets so as to obtain specific target erosion profile

Robert L Anderson; John C. Helmer

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John C. Helmer

Varian Associates

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Kwok Fai Lai

Varian Associates

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