Kyunghun Han

High-Q silicon nitride microresonators exhibiting low-power frequency comb initiation

Optical resonators with high quality factors (Qs) are promising for a variety of applications due to the enhanced nonlinearity and increased photonic density of states at resonances. In particular, frequency combs (FCs) can be generated through four-wave mixing in high-Q microresonators made from Kerr nonlinear materials such as silica, silicon nitride, magnesium fluoride, and calcium fluoride. These devices have potential for on-chip frequency metrology and high-resolution spectroscopy, high-bandwidth radiofrequency information processing, and high-data-rate telecommunications. Silicon nitride microresonators are attractive due to their compatibility with integrated circuit manufacturing; they can be cladded with silica for long-term stable yet tunable operation, and allow multiple resonators to be coupled together to achieve novel functionalities. Despite previous demonstrations of high-Q silicon nitride resonators, FC generation using silicon nitride microresonator chips still requires pump power significantly higher than those in whispering gallery mode resonators made from silica, magnesium, and calcium fluorides, which all have shown resonator Qs between 0.1 and 100 billion. Here, we report on a fabrication procedure that leads to the demonstration of “finger-shaped” Si3N4 microresonators with intrinsic Qs up to 17 million at a free spectrum range (FSR) of 24.7 GHz that are suitable for telecommunication and microwave photonics applications. The frequency comb onset power can be as low as 2.36 mW and broad, single FSR combs can be generated at a low pump power of 24 mW, both within reach of on-chip semiconductor lasers. Our demonstration is an important step toward a fully integrated on-chip FC source.

Dispersion engineering and frequency comb generation in thin silicon nitride concentric microresonators

Kerr nonlinearity-based frequency combs and solitons have been generated from on-chip microresonators. The initiation of the combs requires global or local anomalous dispersion which leads to many limitations, such as material choice, film thickness, and spectral ranges where combs can be generated, as well as fabrication challenges. Using a concentric racetrack-shaped resonator, we show that such constraints can be lifted and resonator dispersion can be engineered to be anomalous over moderately broad bandwidth. We demonstrate anomalous dispersion in a 300 nm thick silicon nitride film, suitable for semiconductor manufacturing but previously thought to result in waveguides with high normal dispersion. Together with a mode-selective, tapered coupling scheme, we generate coherent mode-locked frequency combs. Our method can realize anomalous dispersion for resonators at almost any wavelength and simultaneously achieve material and process compatibility with semiconductor manufacturing.Kerr frequency comb generation from microresonators requires anomalous dispersion, imposing restrictions on materials and resonator design. Here, Kim et al. propose a concentric racetrack-resonator design where the dispersion can be engineered to be anomalous via resonant mode coupling.Kerr nonlinearity based frequency combs and solitons have been generated from on-chip optical microresonators with high quality factors and global or local anomalous dispersion. However, fabrication of such resonators usually requires materials and/or processes that are not standard in semiconductor manufacturing facilities. Moreover, in certain frequency regimes such as visible and ultra-violet, the large normal material dispersion makes it extremely difficult to achieve anomalous dispersion. Here we present a concentric racetrack-shaped resonator that achieves anomalous dispersion in a 300 nm thick silicon nitride film, suitable for semiconductor manufacturing but previously thought to result only in waveguides with high normal dispersion, a high intrinsic Q of 1.5 million, and a novel mode-selective coupling scheme that allows coherent combs to be generated. We also provide evidence suggestive of soliton-like pulse formation in the generated comb. Our method can achieve anomalous dispersion over moderately broad bandwidth for resonators at almost any wavelength while still maintaining material and process compatibility with high-volume semiconductor manufacturing.

50-GHz-spaced comb of high-dimensional frequency-bin entangled photons from an on-chip silicon nitride microresonator

Quantum frequency combs from chip-scale integrated sources are promising candidates for scalable and robust quantum information processing (QIP). However, to use these quantum combs for frequency domain QIP, demonstration of entanglement in the frequency basis, showing that the entangled photons are in a coherent superposition of multiple frequency bins, is required. We present a verification of qubit and qutrit frequency-bin entanglement using an on-chip quantum frequency comb with 40 mode pairs, through a two-photon interference measurement that is based on electro-optic phase modulation. Our demonstrations provide an important contribution in establishing integrated optical microresonators as a source for high-dimensional frequency-bin encoded quantum computing, as well as dense quantum key distribution.

Synthetic aperture microscopy based on referenceless phase retrieval with an electrically tunable lens

Phase imaging microscopy, based either on holography or nonholographic methods such as phase retrieval, has seen considerable attention recently. Phase retrieval offers the advantage of being free of a reference arm and enables a more stable and compact setup. We present an optical setup that provides enhanced resolution by implementing synthetic aperture imaging based on phase retrieval using an electrically tunable lens (ETL). The ETL is a more compact and less expensive alternative to computerized translation stages and spatial light modulators. Before applying phase retrieval, we discuss a general calibration algorithm, which performs image registration, corrects for magnifications, and determines the axial locations of image planes. Finally, we obtain resolution-enhanced images of a phase grating and of cells to demonstrate the practical application of our technique.

Strip-slot direct mode coupler.

We investigate the direct butt coupling between slot and strip waveguides. Contrary to popular belief, the apparent mode mismatch does not deteriorate conversion efficiency. The direct coupler shows 95% conversion efficiency with a broad bandwidth.

Frequency Comb Generation in 300 nm-Thick Si 3 N 4 Concentric-Ring-Resonators

We achieve mode-coupling-induced anomalous dispersion with concentric-ringresonators, and demonstrate frequency comb generation in a 300 nm-thick Si3N4 platform, which is previously viewed too thin to have anomalous dispersion at near infrared. Article not available.

Ultra-high-Q silicon nitride micro-resonators for low-power frequency comb initiation

We report the fabrication and characterization of SiN resonators with intrinsic Qs up to 17 million verified with cavity ring-down measurement. Frequency comb generation threshold down to 2.36 mW is consistent with theoretical estimation.

Comb-Like Frequency-Bin Entangled Photon Pair Generation in Silicon Nitride Microring Resonators

We report a comb-like frequency-bin entangled photon pair source with a high coincidence to accidental ratio in a silicon nitride microring resonator. We measured a Schmidt number of 4.0, thus verifying high degree of time-frequency entanglement.

Comb-Like Photon Pair Generation in Silicon Nitride Microring Resonators

We report a comb-like photon pair source with a high Coincidence to Accidental Ratio (CAR) in a silicon nitride microring resonator. We are able to generate up to 10 sideband pairs with a free spectral range of 378 GHz.