L. Aeschimann

Sub-ppm detection of vapors using piezoresistive microcantilever array sensors

The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual alkanes in a homologous series as well as common volatile organic compounds according to principal component analysis. We developed a new method to evaluate the sensitivity, taking advantage of the low vapor pressures of alkanes with longer chains, such as n-dodecane, n-tridecane and n-tetradecane, under saturated vapor conditions. This method reveals sub-ppm sensitivity and the cantilever response is found to follow the mass of evaporated analytes as calculated using a quantitative model based on the Langmuir evaporation model.

Optical properties of microfabricated fully-metal-coated near-field probes in collection mode

A study of the optical properties of microfabricated, fully-metal-coated quartz probes collecting longitudinal and transverse optical fields is presented. The measurements are performed by raster scanning the focal plane of an objective, focusing azimuthally and radially polarized beams by use of two metal-coated quartz probes with different metal coatings. A quantitative estimation of the collection efficiencies and spatial resolutions in imaging both longitudinal and transverse fields is made. Longitudinally polarized fields are collected with a resolution approximately 1.5 times higher as compared with transversely polarized fields, and this behavior is almost independent of the roughness of the probes metal coating. Moreover, the coating roughness is a critical parameter in the relative collection efficiency of the two field orientations.

Propagation of the electromagnetic field in fully coated near-field optical probes

Fully metal-coated near-field optical probes, based on a cantilever design, have been studied theoretically and experimentally. Numerical simulations prove that these structures allow nonzero modal emission of the electromagnetic field through a 60-nm-thick metallic layer, that is opaque when deposited on flat substrates. The far-field intensity patterns recorded experimentally correspond to the ones calculated for the fundamental and first excited LP modes. Moreover, this study demonstrates that a high confinement of the electromagnetic energy can be reached in the near-field, when illuminated with radially polarized light. Finally, it was verified that the confinement of the field depends on the volume of the probe apex.

Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation

We describe a highly effective method of reducing thermal sensitivity in piezoresistive sensors, in particular silicon cantilevers, by taking advantage of the dependence of the piezoresistive coefficient of silicon on crystallographic orientation. Two similar strain-sensing elements are used, positioned at 45 degrees to each other: One is set along a crystalline axis associated with a maximum piezoresistive coefficient to produce the displacement signal, while the other is set along an axis of the vanishing coefficient to produce the reference signal. Unlike other approaches, both sensing elements are coupled to the same cantilever body, maximizing thermal equilibration. Measurements show at least one order of magnitude improvement in thermal disturbance rejection over conventional approaches using uncoupled resistors.

Piezoresistive cantilever array for life sciences applications

Atomic Force Microscopy (AFM) techniques are used with one- or two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of piezoresistive cantilever for the first time to our knowledge. Noise limitations in topography and force resolutions of these piezolevers are quantified.

Collection of transverse and longitudinal fields by means of apertureless nanoprobes with different metal coating characteristics

The coupling and transmission of transverse and longitudinal fields into apertureless microfabricated near-field optical probes is investigated. Two kinds of probes with different metal coating roughness are considered. Transverse and longitudinal field distributions are obtained by focusing azimuthally and radially polarized beams produced by means of a liquid crystal plate. The focal plane is scanned using microfabricated probes in a collection mode configuration. It is found that the roughness of the metal coating plays an important role in the coupling strength of transverse fields into the probes: the relative coupling efficiency for transverse fields diminishes with a rough metal coating, while that of longitudinal fields does not.

Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single probe was 2.19 µmp–p at ±168 Vp–p. A major issue for the actuator was the insufficient strength of the frame of the probe array chip. The demonstrated array actuator is highly compatible with previously developed parallel readout modules that use either a parallel optical beam or integrated piezoresistive deflection sensing. A large-scale 2D probe array is our ultimate target.

Piezoresistive scanning probe arrays for operation in liquids

Piezoresistive scanning probe arrays have been developed in view of operation in liquid environments. When the cantilevers are immersed in electrically conductive solutions like for instance physiological buffers, the piezoresistive sensing elements as well as the metal connections have to be passivated. For that purpose, the sensors and the metal wiring were covered with different protective coatings. Long term stability of these passivation layers was demonstrated by imaging in a buffer solution for several hours. Moreover, in view of reducing the damping and thus decreasing the hydrodynamic resistance in liquids, special truss cantilevers have been developed. It was found that this special design conferred no improvement in terms of Q-factor and resonant frequency when operated in water. In order to explain the behaviour of these probes, a theoretical model was established. The model predicted that truss structures could theoretically improve the cantilever performances in liquid, but the probes would need to be operated at high frequency, above 10 MHz.

ASSESSMENT OF EARLY OSTEOARTHRITIS IN HUMAN KNEE CARTILAGE BY SCANNING FORCE MICROSCOPY

1. Department of Biophysical and Electronic Engineering, University of Genova, Italy; 2. M.E. Muller Institute for Structural Biology, Biozentrum University of Basel, Switzerland; 3. Department of Orthopaedic Surgery & Traumatology, Kantonsspital, Bruderholz/Basel, Switzerland; 4. Laboratory for Tissue Engineering, Department of Surgery & Research, University Hospital of Basel, Switzerland; 5. Center for Microscopy, University of Basel, Switzerland; 6. Institute of Microtechnology, University of Neuchâtel, Switzerland.

Parallel atomic force microscopy using optical heterodyne detection

We report on an array of atomic force microscopes (AFM) based on a simple optical set-up using heterodyne detection. The deflection of AFM cantilevers is given by the path differences between the reference and the measuring wave in a Michelson interferometer. A matrix of micro-lenses is placed just above the cantilevers, in such a way that the deflected light from each cantilever is collected by one micro-lens. Both the micro-lenses and the cantilever chips are previously glued to increase the robustness of the system. The interference between the light from each micro-lenses and the reference light is selected by a diaphragm and subsequently detected by a photodetector. This procedure is repeated for each cantilever. In order to validate our instrument we measure the profile of a binary grating having a step height of 19.66 nm. By a piezoelectric platform a lateral range of 10 μm was scanned with a speed of 1 μm/s and an integration time of 10 ms, which leads to a lateral resolution of 10 nm. The profiles measured by the cantilevers are in good agreement with the profile of the sample grating.