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Laermer Franz Dr

Bosch

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Publication

Featured researches published by Laermer Franz Dr.

Archive | 1998

Anisotropes fluorbasiertes Plasmaätzverfahren für Silicium

Laermer Franz Dr; Schilp Andrea

Archive | 1995

Verfahren zur Bearbeitung von Silizium

Benz Gerhard Dr; Muenzel Horst Dipl Phys Dr; Laermer Franz Dr; Schilp Andrea

Archive | 1998

Sensor zur kapazitiven Aufnahme einer Beschleunigung

Funk Karsten; Maihoefer Bernd Dr; Laermer Franz Dr; Elsner Bernhard; Frey Wilhelm Dr

Archive | 1993

Etching of structures in wafers or single crystalline material - using masking layers in which structures are etched at different depths corresp. with depth required in silicon@ substrate

Laermer Franz Dr

Archive | 1999

Vorrichtung zum anisotropen Ätzen von Substraten

Becker Volker; Laermer Franz Dr; Schilp Andrea

Archive | 1997

Verfahren zur Herstellung von mikromechanische Strukturen aufweisenden Halbleiterbauelementen

Laermer Franz Dr; Schilp Andrea

Archive | 1995

Method for producing micromechanical components

Benz Gerhard Dr; Marek Jiri Dr Ing Dr; Willmann Martin Dr Ing Dr; Bantien Frank Dipl Phys Dr; Muenzel Horst Dipl Phys Dr; Laermer Franz Dr; Offenberg Michael Dr Ing Dr; Schilp Andrea

Archive | 1993

Measuring acceleration - using silicon@ crystal spring-mass system which is excited into oscillation and measuring oscillation frequency

Friedrich Heinz; Treutler Christoph Dr; Flik Gottfried Dr; Laermer Franz Dr

Archive | 1999

Verfahren zum aufbringen eines schutzlacks auf einen wafer

Becker Volker; Laermer Franz Dr; Schilp Andrea

Archive | 1997

Verfahren zur Herstellung einer Masterstruktur

Mueller-Fiedler Roland Dr; Hahn Dietmar Dr; Laermer Franz Dr; Mayer Klaus-Michael Dr; Kragl Hans Dipl Ing Dr; Wehmann Hergo-Heinrich Dr

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Schilp Andrea

Bosch

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Frey Wilhelm Dr

Bosch

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Benz Gerhard Dr

Bosch

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Elsner Bernhard

Bosch

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Funk Karsten

Bosch

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Muenzel Horst Dipl Phys Dr

Bosch

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Artmann Hans

Bosch

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Bantien Frank Dipl Phys Dr

Bosch

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Becker Volker

Bosch

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Marek Jiri Dr Ing Dr

Bosch

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