Lan Chao-Hui

A Novel Structure of Slot-Antenna Array for Producing Large-Area Planar Surface-Wave Plasmas

The principle of surface wave plasma discharge in a rectangular cavity is introduced and the distribution of the electromagnetic field within a rectangular waveguide is analysed. A novel structure of a slot antenna array is presented. In comparison with the traditional slotantenna, it is shown that the designed slot antenna array can excite effectively the surface wave coupling into the chamber, and generate a stable large-area high-density plasma. These results are useful for exploring the optimized design of the slot-antenna for surface wave plasmas.

Interaction of Electromagnetic Waves with Two-Dimensional Metal Covered with Radar Absorbing Material and Plasma

A two-dimensional metal model is established to investigate the stealth mechanisms of radar absorbing material (RAM) and plasma when they cover the model together. Using the finite-difference time-domain (FDTD) method, the interaction of electromagnetic (EM) waves with the model can be studied. In this paper, three covering cases are considered: a. RAM or plasma covering the metal solely; b. RAM and plasma covering the metal, while plasma is placed outside; c. RAM and plasma covering the metal, while RAM is placed outside. The calculated results show that the covering order has a great influence on the absorption of EM waves. Compared to case a, case b has an advantage in the absorption of relatively high-frequency EM waves (HFWs), whereas case c has an advantage in the absorption of relatively low-frequency EM waves (LFWs). Through the optimization of the parameters of both plasma and RAM, it is hopeful to obtain a broad absorption band by RAM and plasma covering. Near-field attenuation rate and far-field radar cross section (RCS) are employed to compare the different cases.

Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwells equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window.

Estimation of Plasma Density by Surface Plasmons for Surface-Wave Plasmas

An estimation method of plasma density based on surface plasmons theory for surface-wave plasmas is proposed. The number of standing-wave is obtained directly from the discharge image, and the propagation constant is calculated with the trim size of the apparatus in this method, then plasma density can be determined with the value of 9.1 × 1017 m−3. Plasma density is measured using a Langmuir probe, the value is 8.1 × 1017 m−3 which is very close to the predicted value of surface plasmons theory. Numerical simulation is used to check the number of standing-wave by the finite-difference time-domain (FDTD) method also. All results are compatible both of theoretical analysis and experimental measurement.

Three-Dimensional Numerical Simulation of Surface-Wave Plasma Source

A three-dimensional model of a surface-wave plasma (SWP) source is built numerically using the finite-difference time-domain (FDTD) method to investigate the structure of the surface wave propagation along the plasma-dielectric interface and the distributions of electromagnetic fields in the whole system. A good-performance excitation source technique for the waveguide which is pivotal to the simulation is presented. The technique can avoid the dc distortions of magnetic fields caused by the forcing electric wall. An example of simulation is given to confirm the existence of the surface waves. The simulation also shows that the code developed is a useful tool in the computer-aided design of the antenna of the SWP source.

Numerical Study of Spontaneous Outspread of Large-Scale Surface-Wave Plasma Excited by Slot-Antenna Array

The spontaneous outspread of surface-wave plasma (SWP) towards the edge of large-scale quartz window is studied using a time-stepping self-consistent model. The performances of three different types of slot-antenna arrays are compared, and the electron density distributions for each array at different stages are presented. The results show that slotting along both x and y directions can be helpful to the outspread and can thus enhance the uniformity of SWP. Meanwhile, when we use such an array, the absorption rate of input microwave power can reach more than 83%.

Mode Transition of Vacuum Arc Discharge and Its Effect on Ion Current

The mode transition of a pulsed vacuum arc discharge, which is from vacuum surface flashover to non-surface vacuum breakdown or vice versa, is studied by simply adjusting a trigger resistor. This approach provides a possibility to research the transition discharge process. Since the transition process is smooth and controllable, the transition mechanism and its effect on the performance of an ion source can be investigated via various diagnosis experiments. The experimental results show that the mode transition occurs when the resistance is in the range of 0–10Ω. With the mode transition from surface flashover to non-surface vacuum breakdown, the vacuum arc discharge becomes more intense and the ion current produced by the Ti cathode ion source increases by two times. The related physical mechanism is also discussed in detail.

Transient Behavior of Negative Hydrogen Ion Extraction from Plasma

For plasma source, the extraction of negative ions is quite different from that of positive ions. To understand the effect of extraction field on plasma, the time-dependent behavior of negative hydrogen ion extraction from a negative ion source has been studied by particle-in-cell simulation in the collisionless limit. The simulations have shown that, due to the difference in dynamics between electrons and ions, the imbalance of the numbers of charged particles occurs in the source, results in the broadening of plasma sheath and the great increase of plasma potential. The resultant high sheath field and the ambipolar electric field in plasma make the negatively charged particles congregate inside the sheath and move toward the extraction outlet. The emission area of negative ions is much smaller than that of the extraction aperture, which is in sharp contrast to the case of positive ion extraction.

Effect of H− ion extraction on a plasma sheath under an external weak magnetic field

The extraction of negative ions inevitably leads to the destruction of the original plasma state. To understand the effect of extraction on a plasma sheath under a weak magnetic filter field, the time-dependent behavior of H− ion extraction from a negative ion source has been studied by particle-in-cell simulation in the collisionless limit. The simulation results have shown that the plasma sheath would undergo a transient process, in which there exists an edge electrostatic wave that propagates counterclockwise along the wall with a velocity of 4 mm/ns until it reaches the other side of extraction aperture. The thickness of the plasma sheath and the plasma potential both increase greatly at the final quasi-steady-state. For comparison, the results of extracting positive ions are also given.

Propagation of a Scattered Electromagnetic Wave with P-Polarization (TE) Mode in Atmospheric Plasma

The finite-difference-time-domain method is applied to simulate the two-dimensional propagation of a p-polarization mode electromagnetic wave in atmospheric plasma and metal layer for strong electron–neutral collisions. It is indicated that for a giving electron density profile, the p-polarization attenuation is very different from the s-polarization attenuation and it depends even strongly on the incident angle. The mechanism of p-polarization attenuation is analysed by the interference of wave and the relationship between the attenuation property and the main parameters is given.