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Dive into the research topics where Laura Beth Rothman is active.

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Featured researches published by Laura Beth Rothman.


Journal of Vacuum Science and Technology | 1993

Precision parts cleaning using supercritical fluids

Robert J. Purtell; Laura Beth Rothman; Benjamin N. Eldridge; Catherine Chess

Supercritical fluid extraction and chromatography measurements were made on pieces of disk drive actuator components in order to understand how to clean and analyse these parts. Extract analyses were made by Fourier transform infrared (FTIR) and flame ionization detector measurements. Hydrocarbons, silicones, and fluorocarbons were seen on various pieces of different samples using FTIR, time‐of‐flight static secondary‐ion mass spectrometry (TOF‐SSIMS), and x‐ray photoelectron spectroscopy. In addition TOF‐SSIMS detected di‐isooctyl phthalate. Silicones and di‐isooctyl phthalate could be removed by CO2 extraction.


Archive | 1996

Residue removal by supercritical fluids

Kenneth John McCullough; Robert J. Purtell; Laura Beth Rothman; Jin-Jwang Wu


Archive | 1998

Removal of fluorine or chlorine residue by liquid CO2

Kenneth John McCullough; Robert J. Purtell; Laura Beth Rothman; Jin-Jwang Wu


Archive | 1980

Planar multi-level metal process with built-in etch stop

Joseph Skinner Logan; John L. Mauer; Laura Beth Rothman; Geraldine Cogin Schwartz; Charles L. Standley


Archive | 1994

Vapor drain system

Robert J. Baseman; Charles Allan Brown; Benjamin N. Eldridge; Laura Beth Rothman; Herman Russel Wendt; James Tien-Cheng Yeh; Arthur R. Zingher


Archive | 1979

Planar deep oxide isolation process utilizing resin glass and E-beam exposure

Reginald Frank Lever; John L. Mauer; Alwin Earl Michel; Laura Beth Rothman


Archive | 1979

Hybrid process for SBD metallurgies

Laura Beth Rothman; Paul Anthony Totta; James F. White


Archive | 1981

Method for forming planar metal/insulator structures

Valeria Platter; Laura Beth Rothman; Paul M. Schaible; Geraldine Cogin Schwartz


Archive | 1981

Package comprising a substrate, a conductive interconnection pattern and a superposed conductive structure and a method to form part of such a package

Joseph Skinner Logan; Iv John Lester Mauer; Laura Beth Rothman; Geraldine Cogin Schwartz; Charles L. Standley


Archive | 1988

In-line process monitors for thin film wiring

Alina Deutsch; Modest M. Oprysko; John J. Ritsko; Laura Beth Rothman; Helen L. Yeh; Atilio Zupicich

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