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Lee Peng Chua

Lam Research

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Publication

Featured researches published by Lee Peng Chua.

Archive | 2013

Methods and apparatuses for cleaning electroplating substrate holders

Santosh Kumar; Bryan L. Buckalew; Steven T. Mayer; Thomas A. Ponnuswamy; Chad Michael Hosack; Robert Rash; Lee Peng Chua; David W. Porter

Archive | 2015

APPARATUS AND METHOD FOR DYNAMIC CONTROL OF PLATED UNIFORMITY WITH THE USE OF REMOTE ELECTRIC CURRENT

Burhanuddin Kagajwala; Bryan L. Buckalew; Steven T. Mayer; Lee Peng Chua; Aaron Berke; James Isaac Fortner; Robert Rash

Archive | 2013

Cleaning electroplating substrate holders using reverse current deplating

Lee Peng Chua; Steven T. Mayer; Thomas A. Ponnuswamy; Santosh Kumar

Archive | 2013

Protecting anodes from passivation in alloy plating systems

Lee Peng Chua; Steven T. Mayer; David W. Porter; Thomas A. Ponnuswamy

Archive | 2012

Automated cleaning of wafer plating assembly

Steven T. Mayer; Thomas A. Ponnuswamy; Lee Peng Chua; Robert Rash

Archive | 2016

APPARATUS AND METHOD FOR ELECTODEPOSITION OF METALS WITH THE USE OF AN IONICALLY RESISTIVE IONICALLY PERMEABLE ELEMENT HAVING SPATIALLY TAILORED RESISTIVITY

Burhanuddin Kagajwala; Bryan L. Buckalew; Lee Peng Chua; Aaron Berke; Robert Rash; Steven T. Mayer

Archive | 2017

INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER STICKING

Aaron Berke; Robert Rash; Steven T. Mayer; Santosh Kumar; Lee Peng Chua

Archive | 2012

Apparatuses and methods for controlling PH in electroplating baths

Lee Peng Chua; Thomas A. Ponnuswamy; Mark L. Rea; Steven T. Mayer

Archive | 2017

EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS

Gabriel Hay Graham; Bryan L. Buckalew; Steven T. Mayer; Robert Rash; James Isaac Fortner; Lee Peng Chua

Archive | 2016

DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECTROPLATING

Gabriel Hay Graham; Jacob Lee Hiester; Lee Peng Chua; Bryan L. Buckalew

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Collaboration

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Steven T. Mayer

Lam Research

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Robert Rash

Lam Research

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Bryan L. Buckalew

Lam Research

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Thomas A. Ponnuswamy

Lam Research

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Aaron Berke

Lam Research

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Gabriel Hay Graham

Lam Research

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Santosh Kumar

Lam Research

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Burhanuddin Kagajwala

Lam Research

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David W. Porter

Lam Research

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James Isaac Fortner

Lam Research

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