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Robert Rash

Lam Research

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Publication

Featured researches published by Robert Rash.

Archive | 2010

Electroplating flow shaping plate having offset spiral hole pattern

Steven T. Mayer; David W. Porter; Robert Rash

Archive | 2014

Electroplating apparatus for tailored uniformity profile

Steven T. Mayer; David W. Porter; Bryan L. Buckalew; Robert Rash

Archive | 2013

Cross flow manifold for electroplating apparatus

Richard Abraham; Steven T. Mayer; Bryan L. Buckalew; Robert Rash

Archive | 2007

Rapidly cleanable electroplating cup assembly

Shantinath Ghongadi; Robert Rash; Jeff Hawkins; Seshasayee Varadarajan; Tariq Majid; Kousik Ganesan; Bryan L. Buckalew; Brian Evans

Archive | 2008

Electroplating Apparatus with Vented Electrolyte Manifold

Jingbin Feng; Zhian He; Robert Rash; Steven T. Mayer

Archive | 2009

Wafer electroplating apparatus for reducing edge defects

Vinay Prabhakar; Bryan L. Buckalew; Kousik Ganesan; Shantinath Ghongadi; Zhian He; Steven T. Mayer; Robert Rash; Jonathan D. Reid; Yuichi Takada; James R. Zibrida

Archive | 2007

Closed contact electroplating cup assembly

Robert Rash; Shantinath Ghongadi; Kousik Ganesan; Zhian He; Tariq Majid; Jeff Hawkins; Seshasayee Varadarajan; Bryan L. Buckalew

Archive | 2011

Electrolyte loop with pressure regulation for separated anode chamber of electroplating system

Robert Rash; Richard Abraham; David W. Porter; Steven T. Mayer

Archive | 2013

Methods and apparatuses for cleaning electroplating substrate holders

Santosh Kumar; Bryan L. Buckalew; Steven T. Mayer; Thomas A. Ponnuswamy; Chad Michael Hosack; Robert Rash; Lee Peng Chua; David W. Porter

Archive | 2013

Methods and apparatus for wetting pretreatment for through resist metal plating

Bryan L. Buckalew; Steven T. Mayer; Thomas A. Ponnuswamy; Robert Rash; Brian Paul Blackman; Doug Higley

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Steven T. Mayer

Lam Research

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Bryan L. Buckalew

Lam Research

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David W. Porter

Lam Research

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Lee Peng Chua

Lam Research

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Aaron Berke

Lam Research

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Shantinath Ghongadi

Lam Research

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Thomas A. Ponnuswamy

Lam Research

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Seshasayee Varadarajan

Lam Research

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Tariq Majid

Lam Research

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Zhian He

Lam Research

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