Luca Belsito

Fiber Optic Broadband Ultrasonic Probe for Virtual Biopsy: Technological Solutions

An ultrasonic probe was developed by using, in conjunction, opto-acoustic and acousto-optic devices based on fiber optic technology. The intrinsic high frequency and wide bandwidth associated both to the opto-acoustic source and to the acousto-optic receiving element could open a way towards a “virtual biopsy” of biological tissue. A Micro-Opto-Mechanical-System (MOMS) approach is proposed to realize the broadband ultrasonic probe on micromachined silicon frames suited to be mounted on the tip of optical fibers.

Effect of nitrogen implantation at the SiO2/SiC interface on the electron mobility and free carrier density in 4H-SiC metal oxide semiconductor field effect transistor channel

The electrical characteristics of n-metal oxide semiconductor field effect transistors (n-MOSFETs) fabricated on 4H-SiC with a process based on nitrogen (N) implantation in the channel region before the growth of the gate oxide are reported as a function of the N concentration at the SiO2/SiC interface. A strong correlation among the increase in the N concentration, the reduction of the interface state density near the conduction band and the improvement of the MOSFET performance was obtained. Hall-effect measurements were used to determine the electron mobility and the free carrier concentration in the MOSFET channel. Among the investigated combinations of N dose and oxidation time, the one with the higher dose and the shorter time produces MOSFETs with the higher N concentration at the SiO2/SiC interface and the best electrical characteristics. This superior performance is obtained in spite of the lowering of the bulk mobility in the channel of this sample, a negative effect probably ascribable to the i...

Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Micro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonomy to those large numbers of microsensors will be essential. In those scenarios where waste heat sources are present, thermoelectricity will be the obvious choice. However, miniaturization of state of the art thermoelectric modules is not easy with the current technologies used for their fabrication. Micro and nanotechnologies offer an interesting alternative considering that silicon in nanowire form is a material with a promising thermoelectric figure of merit. This paper presents two approaches for the integration of large numbers of silicon nanowires in a cost-effective and practical way using only micromachining and thin-film processes compatible with silicon technologies. Both approaches lead to automated physical and electrical integration of medium-high density stacked arrays of crystalline or polycrystalline silicon nanowires with arbitrary length (tens to hundreds microns) and diameters below 100 nm.

Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology

A micro-opto-mechanical system (MOMS) technology for the fabrication of fiber-optic optoacoustic emitters is presented. The described devices are based on the thermoelastic generation of ultrasonic waves from patterned carbon films obtained by the controlled pyrolysis of photoresist layers and fabricated on miniaturized single-crystal silicon frames used to mount the emitters on the tip of an optical fiber. Thanks to the micromachining process adopted, high miniaturization levels are reached in the fabrication of the emitters, and self-standing devices on optical fiber with diameter around 350 µm are demonstrated, potentially suited to minimally invasive medical applications. The functional testing of fiber-optic emitter prototypes in water performed by using a 1064 nm Q-switched Nd-YAG excitation laser source is also presented, yielding broadband emission spectra extended from low frequencies up to more than 40 MHz, and focused emission fields with a maximum peak-to-peak pressure level of about 1.2 MPa at a distance of 1 mm from the devices.

Influence of Grain Size on the Thermoelectric Properties of Polycrystalline Silicon Nanowires

The thermoelectric properties of doped polycrystalline silicon nanowires have been investigated using doping techniques that impact grain growth in different ways during the doping process. In particular, As- and P-doped nanowires were fabricated using a process flow which enables the manufacturing of surface micromachined nanowires contacted by Al/Si pads in a four-terminal configuration for thermal conductivity measurement. Also, dedicated structures for the measurement of the Seebeck coefficient and electrical resistivity were prepared. In this way, the thermoelectric figure of merit of the nanowires could be evaluated. The As-doped nanowires were heavily doped by thermal doping from spin-on-dopant sources, whereas predeposition from POCl3 was utilized for the P-doped nanowires. The thermal conductivity measured on the nanowires appeared to depend on the doping type. The P-doped nanowires showed, for comparable cross-sections, higher thermal conductivity values than As-doped nanowires, most probably because of their finer grain texture, resulting from the inhibition effect that such doping elements have on grain growth during high-temperature annealing.

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double- ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20–35 °C using the reference sensor.

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine. The devices are based on the use of a SU-8 polymer interferometer manufactured on a micromachined silicon frame whose thickness can be modulated by the incoming ultrasound waves. In this way, the ultrasonic detection is performed by measuring the Fabry-Perot thickness modulation from the variation of the reflected intensity of a fiber-driven continuous laser beam hitting the interferometer.

Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range

We present a design study aimed at fabricating micromachined thermal emitters for infrared gas sensing with high emission efficiency in the 9-12 μm wavelength range. In order to achieve high optical radiance with relatively low power consumption and possibility of fast thermal modulation, a technology based on dielectric membranes composed by stacked silicon oxide and nitride with platinum heaters is adopted, that guarantees good thermal isolation and reduced thermal mass. The dielectric stack adopted is composed in such a way that its emissivity is enhanced in the wavelength range of concern and an optimized design of the emitter geometry is proposed based on finite element thermal simulations. Some preliminary experimental results are presented about the optical properties of the structural layer and its medium-term reliability when operated with Pt heaters at a temperature around 600°C.

Autonomous robotic system for tunnel structural inspection and assessment

This paper presents a robotic platform, capable of autonomous tunnel inspection, developed under ROBO-SPECT European union funded research project. The robotic vehicle consists of a robotized production boom lift, a high precision robotic arm, advanced computer vision systems, a 3D laser scanner and an ultrasonic sensor. The autonomous inspection of tunnels requires advanced capabilities of the robotic vehicle and the computer vision sub-system. The robot localization in underground spaces and on long linear paths is a challenging task, as well as the mm accurate positioning of a robotic tip installed on a five-ton crane vehicle. Moreover, the 2D and 3D vision tasks, which support the inspection process, should tackle with poor and variable lighting conditions, low textured lining surfaces and the need for high accuracy. This contribution describes the final robotic vehicle and the developments as designed for concrete lining tunnel inspection. Results from the validation and benchmarking of the system are also included following the final tests at the operating Egnatia Motorway tunnels in northern Greece.

MOMS technology for fully fiber optic ultrasonic probes: A proposal for virtual biopsy

An ultrasonic probe was developed by using, in conjunction, opto-acoustic and acousto-optic devices based on fiber optic technology. The intrinsic high frequency and wide bandwidth associated both to the opto-acoustic source and to the acousto-optic receiving element could open a way towards a “virtual biopsy” of biological tissue. A Micro-Opto-Mechanical-System (MOMS) approach is proposed to realize the broadband ultrasonic probe on micromachined silicon frames suited to be mounted on the tip of optical fibers.