M. De Volder

The use of liquid crystals as electrorheological fluids in microsystems: model and measurements

Fluids with controllable flow properties have gained considerable interest in the past few years. Some of these fluids such as magnetorheologic fluids are now widely applied to active dampers and valves. Although these fluids show promising properties for microsystems, their applicability is limited to the microscale since particles suspended in these fluids tend to obstruct microchannels. This paper investigates the applicability of electrorheologic liquid crystals (LCs) in microsystems. Since LCs do not contain suspended particles, they show intrinsic advantages over classic rheologic fluids in micro-applications. This paper presents a novel physical model that describes the static and the dynamic behaviour of electrorheologic LCs. The developed model is validated by comparing simulations and measurements performed on a rectangular microchannel. This assessment shows that the model presented in this paper is able to simulate both static and dynamic properties accurately. Therefore, this model is useful for the understanding, simulation and optimization of devices using LCs as electrorheological fluid. In addition, measurements performed in this paper reveal remarkable properties of LCs, such as high bandwidths and high changes in flow resistance.

Air-based photoelectrochemical cell capturing water molecules from ambient air for hydrogen production

A system is demonstrated that autonomously produces hydrogen gas using sunlight and outside air as the only inputs. Oxygen and hydrogen formation reactions occur on either side of a monolithic “solar membrane” inserted in a two-compartment photoelectrochemical cell. A surface film of Nafion® serves as a solid electrolyte. This proof of concept invites further development of air-based cells.

Integrated high pressure microhydraulic actuation and control for surgical instruments

To reduce the surgical trauma to the patient, minimally invasive surgery is gaining considerable importance since the eighties. More recently, robot assisted minimally invasive surgery was introduced to enhance the surgeon’s performance in these procedures. This resulted in an intensive research on the design, fabrication and control of surgical robots over the last decades. A new development in the field of surgical tool manipulators is presented in this article: a flexible manipulator with distributed degrees of freedom powered by microhydraulic actuators. The tool consists of successive flexible segments, each with two bending degrees of freedom. To actuate these compliant segments, dedicated fluidic actuators are incorporated, together with compact hydraulic valves which control the actuator motion. Especially the development of microvalves for this application was challenging, and are the main focus of this paper. The valves distribute the hydraulic power from one common high pressure supply to a series of artificial muscle actuators. Tests show that the angular stroke of the each segment of this medical instrument is 90°.

Microsized Piston-Cylinder Pneumatic and Hydraulic Actuators Fabricated by Lithography

Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities. In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper describes a fabrication process for piston-cylinder pneumatic and hydraulic actuators based on etching techniques, UV-definable polymers, and low-temperature bonding. Prototype actuators with a piston area of 0.15 mm2 have been fabricated in order to validate the production process. These actuators achieve actuation forces of more than 0.1 N and strokes of 750 mum using pressurized air or water as driving fluid.

A temperature sensor from a self-assembled carbon nanotube microbridge

Recent studies show that carbon nanotubes (CNTs) can be used as temperature sensors, and offer great opportunities towards extreme miniaturization, high sensitivity, low power consumption, and rapid response. Previous CNT based temperature sensors are fabricated by either dielectrophoresis or piece-wise alignment of read-out electronics around randomly dispersed CNTs. We introduce a new deterministic and parallel microsensor fabrication method based on the self-assembly of CNTs into three-dimensional microbridges. We fabricated prototype microbridge sensors on patterned electrodes, and found their sensitivity to be better than −0.1 %/K at temperatures between 300K and 420K. This performance is comparable to previously published CNT based temperature sensors. Importantly, however, our research shows how unique sensor architectures can be made by self-assembly, which can be achieved using batch processing rather than piece-wise assembly.

2-Scale topography dry electrode for biopotential measurements

The design and fabrication of a novel 2-scale topography dry electrode using macro and micro needles is presented. The macro needles enable biopotential measurements on hairy skin, the function of the micro needles is to decrease the electrode impedance even further by penetrating the outer skin layer. Also, a fast and reliable impedance characterization protocol is described. Based on this impedance measurement protocol, a comparison study is made between our dry electrode, 3 other commercial dry electrodes and a standard wet gel electrode. Promising results are already obtained with our electrodes which do not have skin piercing micro needles. For the proposed electrodes, three different conductive coatings (Ag/AgCl/Au) are compared. AgCl is found to be slightly better than Ag as coating material, while our Au coated electrodes have the highest impedance.

Large stroke high force pneumatic actuators fabricated by SU-8 micromachining

Applications where a microsystem has to interface with the outside world are often face the rather small force output or stroke that a typical microfabricated actuator can generate. However, microscale piston-cylinder pneumatic or hydraulic actuators offer a significant improvement of the stroke and force output of microactuators. For the first time, a process is presented that enables batch fabrication of such actuators by a lithographic process based on SU-8 photoepoxy. The total volume of the smallest of these actuators is a mere ∼1 mm3. The maximum force obtained is 37 mN for an applied pressure of 10 bars. The actuator stroke is 1.1 mm.

A ferrofluid seal technology for fluidic microactuators

Recent research revealed that microactuators driven by pressurized fluids are able to generate high power and force densities at microscale. Despite these promising properties, fluidic actuators are rare in microsystem technology. The main technological barrier in the development of these actuators is the fabrication of powerful seals with low leakage. This paper presents a seal technology for linear fluidic microactuators based on ferrofluids. An accurate design method for these seals has been developed and validated by measurements on miniaturized actuator prototypes. Our current actuator prototypes are able to seal pressures up to 16 bar without leakage. The actuator has an outside diameter of 2 mm, a length of 13 mm and the actuator is able to generate forces of 0.65 N and a stroke of 10 mm. Moreover, promising properties such as the restoration of the seal after a pressure overload have been observed.

A fast, high-stiffness and high-resolution piezoelectric motor with integrated bearing and driving functionality

Abstract With growing requirements on the precision of production machines, as expressed by the Taniguchi curves, the need arises for novel actuators that are able to combine high stiffness and high position resolution with high drive speeds. In this paper two novel integrated linear actuation systems with high active stiffness and with the unique ability to provide simultaneously high-resolution slow motion and lower-resolution high-speed motion, based on piezotechnology, are presented. Potential applications are stages for novel high-precision abrasive machining (e.g. ultraprecision grinding), lithography (e.g. extreme-UV wafer steppers), positioning devices working in vacuum (e.g. scanning electron microscopy).

Design and Characterisation of a Hydraulic Microactuator Fabricated by Lithography

To improve the force output of microactuators, this work focuses on actuators driven by pressurized gasses or liquids. Despite their well known ability to generate high actuation forces, hydraulic actuators remain uncommon in microsystems. This is both due to the difficulty of fabricating these microactuators with the existing micromachining processes and to the lack of adequate microseals. This paper describes how to overcome these limitations with a combination of anisotropic micromachining, UV definable polymers and low temperature bonding. The functionality of these actuators is proven by extensive measurements which showed that actuation forces of 0.1 N can be achieved for actuators with an active cross-section of 0.15 mm2. This is an order of magnitude higher than what is reported for classic MEMS actuators of similar size.