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Makoto Nagashima

Applied Materials

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Publication

Featured researches published by Makoto Nagashima.

Archive | 1991

Cleaning method for semiconductor wafer processing apparatus

Makoto Nagashima; Naoaki Kobayashi; Jerry Wong

Archive | 1990

Two step process for forming void-free oxide layer over stepped surface of semiconductor wafer

Peter Wai-Man Lee; David Nin-Kou Wang; Makoto Nagashima; Kazuto Fukuma; Tatsuya E. Sato

Archive | 1994

Chemical vapor deposition method and apparatus therefore

Makoto Nagashima; Hiroshi Nishizato; Hirofumi Ono

Archive | 1991

Method for forming a boron phosphorus silicate glass composite layer on a semiconductor wafer

Peter Wai-Man Lee; David Nin-Kou Wang; Makoto Nagashima; Kazuto Fukuma; Tetsuya Sato

Archive | 1992

Boron phosphorus silicate glass composite layer on semiconductor wafer

Peter Wai-Man Lee; David Nin-Kou Wang; Makoto Nagashima; Kazuto Fukuma; Tetsuya Sato

Archive | 1990

Chemical vapor deposition method and apparatus therefor

Makoto Nagashima; Hiroshi Nishizato; Hirofumi Ono

Archive | 1990

An integrated circuit structure with a boron phosphorus silicate glass composite layer on semiconductor wafer and improved method for forming same

Peter Wai-Man Lee; David Nin-Kou Wang; Makoto Nagashima; Kazuto Fukuma; Tetsuya Sato

Archive | 1991

Two step process for forming an oxide layer over a stepped surface of a semiconductor wafer

Lee Peter Wai-Man; Wang David Nin-Kou; Makoto Nagashima; Kazuto Fukuma; Tatsuya E. Sato

Archive | 1991

***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***Cleaning method for semiconductor wafer processing apparatus

Makoto Nagashima; Naoaki Kobayashi; Jerry Wong

Archive | 1991

Two-stage process for producing an oxide layer on a stepped semiconductor wafer surface

Lee Peter Wai-Man; Wang David Nin-Kou; Makoto Nagashima; Kazuto Fukuma; Tatsuya E. Sato

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Kazuto Fukuma

Applied Materials

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Jerry Wong

Applied Materials

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Naoaki Kobayashi

Applied Materials

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David Nin-Kou Wang

Applied Materials

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Hirofumi Ono

Applied Materials

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Hiroshi Nishizato

Applied Materials

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Peter Wai-Man Lee

Applied Materials

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Tatsuya E. Sato

Applied Materials

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Lee Peter Wai-Man

Applied Materials

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Tetsuya Sato

Applied Materials

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