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Marcus Ahles

Bosch

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Publication

Featured researches published by Marcus Ahles.

Archive | 2009

Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate

Torsten Kramer; Marcus Ahles; Armin Grundmann; Kathrin Knese; Hubert Benzel; Gregor Schuermann; Simon Armbruster

Archive | 2011

Micromechanical pressure-sensor element and method for its production

Marcus Ahles; Hubert Benzel

Archive | 2011

Component having a via

Marcus Ahles; Jochen Reinmuth; Hubert Benzel; Simon Armbruster

Archive | 2009

Sensor system, method for operating a sensor system, and method for manufacturing a sensor system

Marcus Ahles; Hubert Benzel; Heribert Weber

Archive | 2009

Verfahren zur Herstellung einer mikromechanischen Membranstruktur mit Zugang von der Substratrückseite

Torsten Kramer; Marcus Ahles; Armin Grundmann; Kathrin Knese; Hubert Benzel; Gregor Schuermann; Simon Armbruster

Archive | 2012

Sensor system for detecting high pressures

Marcus Ahles; Hubert Benzel

Archive | 2010

Verfahren zur herstellung eines mikromechanischen bauelements sowie mit dem verfahren hergestelltes bauelement bzw. dessen verwendung

Marcus Ahles; Hubert Benzel; Heribert Weber

Archive | 2010

Sensor arrangement for differential pressure measurement, has micro-mechanical sensor element, where volume between separation membrane and measuring diaphragm is filled by incompressible transmission medium

Marcus Ahles; Hubert Benzel

Archive | 2017

SEMICONDUCTOR SENSOR FOR GAS CONCENTRATION

Andreas Haeffelin; Harald Guenschel; Janine Riedrich-moeller; Marcus Ahles

Archive | 2016

Halbleitersensor für eine Gaskonzentration Semiconductor sensor for gas concentration

Harald Guenschel; Marcus Ahles; Janine Riedrich-moeller; Andreas Haeffelin

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Collaboration

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Hubert Benzel

Bosch

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Simon Armbruster

Bosch

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Armin Grundmann

Bosch

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Gregor Schuermann

Bosch

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Heribert Weber

Bosch

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Kathrin Knese

Bosch

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Torsten Kramer

Bosch

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Andreas Duell

Bosch

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Andreas Haeffelin

Bosch

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Harald Guenschel

Bosch

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