Maria Elina Simon

Monolithic MEMS optical switch with amplified out-of-plane angular motion

We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

Optical MEMS devices for telecom systems

As telecom networks increase in complexity there is a need for systems capable of manage numerous optical signals. Many of the channel-manipulation functions can be done more effectively in the optical domain. MEMS devices are especially well suited for this functions since they can offer large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of Optical Cross Connects, WDM spectrum equalizers and Optical Add-Drop multiplexors based on different fabrication technologies such as polySi surface micromachining, single crystal SOI and combination of both. We show specific examples of these devices, discussing design trade-offs, fabrication requirements and optical performance in each case.

Compact spectral pulse shaping using hybrid planar lightwave circuit and free-space optics with MEMS piston micromirrors and spectrogram feedback control

We combine a PLC and free-space optics for a compact Fourier-plane pulse shaper with low polarization dependencies. A micromirror array with piston motion provides phase modulation. The shaped electric field is extracted from a recorded spectrogram of the synthesized waveform.

Closed-loop AO demonstration of MEMS SLM with piston, tip, and tilt control

A MEMS SLM with an array of 64×64 pixels, each 120 μm ×120 μm in size, with 98% fill-factor, has been developed. Each reflector in the array is capable of 5 μm of stroke, and ±4° tip and tilt. From a prototype array, 14 contiguous pixels have been independently wired-out to off-chip drive electronics. These 14 pixels have been demonstrated to be effective in an off-the-shelf AO system (with requisite modifications to suit the SLM). For a low-order static aberration, the measured Strehl ratio has been improved from 0.069 to 0.861, a factor of 12 improvement.

MEMS mirror array for a wavelength-selective 1xK switch

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.