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Mark Taskar

Lam Research

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Publication

Featured researches published by Mark Taskar.

Archive | 2010

FLEXIBLE MANIFOLD FOR INTEGRATED GAS SYSTEM GAS PANELS

Mark Taskar

Archive | 2008

Alternate gas delivery and evacuation system for plasma processing apparatuses

Harry P. Wong; Vernon Wong; Christopher Griffin; Mark Taskar

Archive | 2008

UNIVERSAL FLUID FLOW ADAPTOR

Mark Taskar

Archive | 2005

Optimized activation prevention assembly for a gas delivery system and methods therefor

Mark Taskar

Archive | 2012

SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS

Iqbal Shareef; Piyush Agarwal; Evangelos Spyropoulos; Mark Taskar

Archive | 2008

Gas transport delay resolution for short etch recipes

Iqbal Shareef; Mark Taskar; Tony Zemlock

Archive | 2008

TRIPLE VALVE INLET ASSEMBLY

Mark Taskar

Archive | 2012

GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS THEREFOR

Iqbal Shareef; Mark Taskar; Evangelos Spyropoulos

Archive | 2016

GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABLE GAS FLOW CONTROL

Mark Taskar; Iqbal Shareef; Anthony Zemlock; Ryan Bise; Nathan Kugland

Archive | 2013

Cluster mass flow devices and multi-line mass flow devices incorporating the same

Mark Taskar; Iqbal Shareef

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Iqbal Shareef

Lam Research

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Evangelos Spyropoulos

Lam Research

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Anthony Zemlock

Lam Research

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Tony Zemlock

Lam Research

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Christopher Griffin

Lam Research

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Harry P. Wong

Lam Research

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Nathan Kugland

Lam Research

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Piyush Agarwal

Lam Research

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Ryan Bise

Lam Research

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Vernon Wong

Lam Research

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