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Iqbal Shareef

Lam Research

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Publication

Featured researches published by Iqbal Shareef.

Archive | 2007

Methods for performing actual flow verification

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2007

Methods for performing transient flow prediction and verification using discharge coefficients

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2012

SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS

Iqbal Shareef; Piyush Agarwal; Evangelos Spyropoulos; Mark Taskar

Archive | 2009

Methods for controlling time scale of gas delivery into a processing chamber

Gunsu Yun; Iqbal Shareef; Kurt Jorgensen; Robert Charatan

Archive | 2008

Gas transport delay resolution for short etch recipes

Iqbal Shareef; Mark Taskar; Tony Zemlock

Archive | 2011

Method and apparatus for shaping gas profile near bevel edge

Jack Chen; Andrew D. Bailey; Iqbal Shareef

Archive | 2012

GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS THEREFOR

Iqbal Shareef; Mark Taskar; Evangelos Spyropoulos

Archive | 2010

Methods for delivering a process gas

Iqbal Shareef; James V. Tietz; Vernon Wong; Richard J. Meinecke

Archive | 2016

GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABLE GAS FLOW CONTROL

Mark Taskar; Iqbal Shareef; Anthony Zemlock; Ryan Bise; Nathan Kugland

Archive | 2015

Monolithic ceramic component of gas delivery system and method of making and use thereof

John Daugherty; Iqbal Shareef; Mike Ingamells

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Mark Taskar

Lam Research

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Evangelos Spyropoulos

Lam Research

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James V. Tietz

Lam Research

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Richard J. Meinecke

Lam Research

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Anthony Zemlock

Lam Research

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Vernon Wong

Lam Research

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Piyush Agarwal

Lam Research

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Tony Zemlock

Lam Research

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Andreas Fischer

Lam Research

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Andrew D. Bailey

Lam Research

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