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Mark V. Smith

Entegris

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Publication

Featured researches published by Mark V. Smith.

Archive | 1998

Filter cartridge assembly for a gas purging system

Gerald D. Reynolds; Gary M. Gallagher; John Burns; Mark V. Smith

Archive | 2004

Front opening substrate container with bottom plate

John Burns; Matthew A. Fuller; Jeffery J. King; Martin L. Forbes; Mark V. Smith

Archive | 2006

Cmp retaining ring

John Burns; Martin L. Forbes; Matthew A. Fuller; Jeffery J. King; Mark V. Smith

Archive | 2001

Smif container including an electrostatic dissipative reticle support structure

Mark V. Smith; Robert P. Wartenbergh; William P. Pennybacker

Archive | 2007

Wafer container and door with vibration dampening latching mechanism

John Burns; Matthew A. Fuller; Jeffery J. King; Martin L. Forbes; Mark V. Smith

Archive | 2004

Wafer container with door actuated wafer restraint

John Burns; Matthew A. Fuller; Jeffery J. King; Martin L. Forbes; Mark V. Smith

Archive | 2004

Photochromic substrate container

John Burns; Matthew A. Fuller; Jeffrey J. King; Martin L. Forbes; Mark V. Smith

Archive | 2009

WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS

James A. Watson; John Burns; Martin L. Forbes; Matthew A. Fuller; Mark V. Smith

Archive | 2005

Wafer container with secondary wafer restraint system

John Burns; Matthew A. Fuller; Jeffery J. King; Martin L. Forbes; Mark V. Smith

Archive | 2007

KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES

John Burns; Martin L. Forbes; Matthew A. Fuller; Jeffrey J. King; Mark V. Smith

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Collaboration

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John Burns

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Matthew A. Fuller

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Martin L. Forbes

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Jeffery J. King

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Robert P. Wartenbergh

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William P. Pennybacker

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Jeffrey J. King

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Eric S. Olson

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Russ V. Raschke

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James A. Watson

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