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Dive into the research topics where Marko Tuominen is active.

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Featured researches published by Marko Tuominen.


Journal of The Electrochemical Society | 1997

Thermodynamic considerations of the role of hydrogen in sublimation growth of silicon carbide

Peter Raåback; Risto M. Nieminen; Rositza Yakimova; Marko Tuominen; Erik Janzén

The purpose of this study was to investigate the thermodynamic consequences of added hydrogen to the sublimation growth process of silicon carbide crystals. The results show that at each temperature there exists a level of hydrogen that leads to a silicon-to-carbon ratio of unity. At typical growth temperatures the added hydrogen does not significantly affect the supersaturation ratio.


Archive | 1997

Device for epitaxially growing objects and method for such a growth

Alex Ellison; Olle Kordina; Chun-Yuan Gu; Christer Hallin; Erik Janzen; Marko Tuominen


Archive | 1995

Device for heat treatment of objects and a method for producing a susceptor

Olle Kordina; Willy Hermansson; Marko Tuominen


Archive | 1995

Device for epitaxially growing objects

Asko Vehanen; Rositza Yakimova; Marko Tuominen; Olle Kordina; Christer Hallin; Erik Janzen


Archive | 1996

A method for epitaxially growing objects and a device for such a growth

Olle Kordina; Christer Hallin; Erik Janzen; Asko Vehanen; Rositza Yakimova; Marko Tuominen


Materials Science Forum | 1998

High Voltage (>2.5kV) 4H-SiC Schottky Rectifiers Processed on Hot-Wall CVD and High-Temperature CVD Layers

Tsunenobu Kimoto; Q. Wahab; A. Ellison; Urban Forsberg; Marko Tuominen; Rositza Yakimova; Anne Henry; Erik Janzén


Materials Science Forum | 1998

High Growth Rate of α-SiC by Sublimation Epitaxy

Mikael Syväjärvi; Rositza Yakimova; Mike F. MacMillan; Marko Tuominen; Anelia Kakanakova-Georgieva; Carl Hemmingsson; Ivan Gueorguiev Ivanov; Erik Janzén


Materials Science Forum | 1998

A coupled finite element model for the sublimation growth of SiC

Peter Raback; Risto M. Nieminen; Rositza Yakimova; Marko Tuominen; Erik Janzén


Materials Science Forum | 1998

Domain Occurance in SiC Epitaxial Layers Grown by Sublimation

Marko Tuominen; Rositza Yakimova; Anelia Kakanakova-Georgieva; Mike F. MacMillan; Mikael Syväjärvi; Erik Janzén


Archive | 1997

Method and apparatus for growing objects epiktaktischem

Alex Ellison; Chun-Yuan Gu; Christer Hallin; N Erik Janz; Olle Kordina; Marko Tuominen

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