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Markus Deguenther

Carl Zeiss AG

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Publication

Featured researches published by Markus Deguenther.

Archive | 2008

Polarization-modulating optical element

Damian Fiolka; Markus Deguenther

Archive | 2005

Optical beam transformation system and illumination system comprising an optical beam transformation system

Joerg Schultz; Markus Deguenther; Markus Brotsack; Gerhard Fuerter; Wolfgang Singer; Manfred Maul; Alexander Kohl; Damian Fiolka

Archive | 2008

Illumination system for illuminating a mask in a microlithographic exposure apparatus

Markus Deguenther; Paul Graeupner; Juergen Fischer

Archive | 2014

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

Stefan Xalter; Yim-Bun Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Deguenther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh

Archive | 2006

Optical device with raster elements, and illumination system with the optical device

Wolfgang Singer; Johannes Wangler; Markus Deguenther; Birgit Kuerz; Christoph Menke

Archive | 2006

Device for adjusting the illumination dose on a photosensitive layer

Toralf Gruner; Markus Deguenther

Archive | 2011

Illumination system and lithographic apparatus

Heine Melle Mulder; Steven George Hansen; Johannes Catharinus Hubertus Mulkens; Markus Deguenther

Archive | 2010

Illumination system for illuminating a mask in a microlithographic projection exposure apparatus

Markus Deguenther; Michael Layh

Archive | 2006

OPTICAL DEVICE COMPRISING RASTER ELEMENT, AND IRRADIATION SYSTEM COMPRISING THE OPTICAL DEVICE

Mecking Burgurt; Markus Deguenther; Wolfgang Singer; Johannes Wangler; ジンガー ヴォルフガング; メッキング ブルグルト; デギュンター マルクス; ヴァングラー ヨハネス

Archive | 2004

Device and method for illumination dose adjustments in microlithography

Markus Deguenther; Toralf Gruner

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Collaboration

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Michael Layh

Carl Zeiss AG

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Johannes Wangler

Carl Zeiss AG

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Michael Patra

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Artur Hoegele

Carl Zeiss AG

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Manfred Maul

Carl Zeiss AG

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Markus Schwab

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Toralf Gruner

Carl Zeiss AG

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Johannes Eisenmenger

Carl Zeiss AG

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