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Dive into the research topics where Markus Deguenther is active.

Publication


Featured researches published by Markus Deguenther.


Archive | 2008

Polarization-modulating optical element

Damian Fiolka; Markus Deguenther


Archive | 2005

Optical beam transformation system and illumination system comprising an optical beam transformation system

Joerg Schultz; Markus Deguenther; Markus Brotsack; Gerhard Fuerter; Wolfgang Singer; Manfred Maul; Alexander Kohl; Damian Fiolka


Archive | 2008

Illumination system for illuminating a mask in a microlithographic exposure apparatus

Markus Deguenther; Paul Graeupner; Juergen Fischer


Archive | 2014

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

Stefan Xalter; Yim-Bun Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Deguenther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh


Archive | 2006

Optical device with raster elements, and illumination system with the optical device

Wolfgang Singer; Johannes Wangler; Markus Deguenther; Birgit Kuerz; Christoph Menke


Archive | 2006

Device for adjusting the illumination dose on a photosensitive layer

Toralf Gruner; Markus Deguenther


Archive | 2011

Illumination system and lithographic apparatus

Heine Melle Mulder; Steven George Hansen; Johannes Catharinus Hubertus Mulkens; Markus Deguenther


Archive | 2010

Illumination system for illuminating a mask in a microlithographic projection exposure apparatus

Markus Deguenther; Michael Layh


Archive | 2006

OPTICAL DEVICE COMPRISING RASTER ELEMENT, AND IRRADIATION SYSTEM COMPRISING THE OPTICAL DEVICE

Mecking Burgurt; Markus Deguenther; Wolfgang Singer; Johannes Wangler; ジンガー ヴォルフガング; メッキング ブルグルト; デギュンター マルクス; ヴァングラー ヨハネス


Archive | 2004

Device and method for illumination dose adjustments in microlithography

Markus Deguenther; Toralf Gruner

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